Masahiro Nakagawa

Person

Ageo-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 10,025,194
- Issue date Jul 17, 2018
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 9,513,558
- Issue date Dec 6, 2016
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,749,759
- Issue date Jun 10, 2014
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,139,198
- Issue date Mar 20, 2012
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus and method
- Patent number 6,668,075
- Issue date Dec 23, 2003
- Nikon Corporation
- Ayako Nakamura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Position detection apparatus and aligner comprising same
- Patent number 5,859,707
- Issue date Jan 12, 1999
- Nikon Corporation
- Masahiro Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for alignment with a substrate, using coma imp...
- Patent number 5,783,833
- Issue date Jul 21, 1998
- Nikon Corporation
- Ayako Sugaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and method for optical system, exposure appara...
- Patent number 5,754,299
- Issue date May 19, 1998
- Nikon Corporation
- Ayako Sugaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting apparatus and projection exposure apparatus
- Patent number 5,684,569
- Issue date Nov 4, 1997
- Nikon Corporation
- Ayako Sugaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and method for optical system, exposure appara...
- Patent number 5,680,200
- Issue date Oct 21, 1997
- Nikon Corporation
- Ayako Sugaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light exposure system
- Patent number 5,309,198
- Issue date May 3, 1994
- Nikon Corporation
- Masahiro Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 5,184,196
- Issue date Feb 2, 1993
- Nikon Corporation
- Masahiro Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical apparatus
- Patent number 4,939,630
- Issue date Jul 3, 1990
- Nikon Corporation
- Tetsuo Kikuchi
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20180348643
- Publication date Dec 6, 2018
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20170082925
- Publication date Mar 23, 2017
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20140240685
- Publication date Aug 28, 2014
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus, Exposure Method, and Method for Producing Device
- Publication number 20130027682
- Publication date Jan 31, 2013
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20080042068
- Publication date Feb 21, 2008
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20060181690
- Publication date Aug 17, 2006
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20060170891
- Publication date Aug 3, 2006
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Masahiro Nakagawa

Person

Patents Grantslast 30 patents

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Position detection apparatus and method

Position detection apparatus and aligner comprising same

Method and apparatus for alignment with a substrate, using coma imp...

Inspection apparatus and method for optical system, exposure appara...

Position detecting apparatus and projection exposure apparatus

Inspection apparatus and method for optical system, exposure appara...

Light exposure system

Projection exposure apparatus

Illumination optical apparatus

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

Exposure Apparatus, Exposure Method, and Method for Producing Device

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device