Masahiro Nakaharada

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of measuring a temperature of a heat plate and method thereof
- Patent number 10,359,320
- Issue date Jul 23, 2019
- Tokyo Electron Limited
- Tsuyoshi Nogami
- G01 - MEASURING TESTING
Information Patent Grant
Substrate treatment system, substrate transfer method and computer...
- Patent number 9,984,905
- Issue date May 29, 2018
- Tokyo Electron Limited
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment system, substrate transfer method and computer...
- Patent number 9,984,904
- Issue date May 29, 2018
- Tokyo Electron Limited
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment system, substrate transfer method and computer...
- Patent number 9,460,942
- Issue date Oct 4, 2016
- Tokyo Electron Limited
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate transfer method, and a non-tr...
- Patent number 9,287,145
- Issue date Mar 15, 2016
- Tokyo Electron Limited
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate transfer method and non-trans...
- Patent number 9,082,800
- Issue date Jul 14, 2015
- Tokyo Electron Limited
- Suguru Enokida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,985,929
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Suguru Enokida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate transfer method and apparatus
- Patent number 8,441,618
- Issue date May 14, 2013
- Tokyo Electron Limited
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate carrying apparatus, substrate carrying method, and coatin...
- Patent number 7,563,042
- Issue date Jul 21, 2009
- Tokyo Electron Limited
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 7,284,917
- Issue date Oct 23, 2007
- Tokyo Electron Limited
- Seiki Ishida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MEASURING A TEMPERATURE OF A HEAT PLATE AND METHOD THEREOF
- Publication number 20170234737
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Tsuyoshi NOGAMI
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
- Publication number 20160372346
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Masahiro NAKAHARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
- Publication number 20160372345
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
- Publication number 20130112224
- Publication date May 9, 2013
- TOKYO ELECTRON LIMITED
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND A NON-TR...
- Publication number 20130112223
- Publication date May 9, 2013
- TOKYO ELECTRON LIMITED
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20130078059
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Suguru ENOKIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND NON-TRANS...
- Publication number 20130078061
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Suguru ENOKIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD AND APPARATUS
- Publication number 20100321648
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Masahiro NAKAHARADA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate carrying apparatus, sustrate carrying method, and coating...
- Publication number 20070195297
- Publication date Aug 23, 2007
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060177586
- Publication date Aug 10, 2006
- TOKYO ELECTRON LIMITED
- Seiki Ishida
- H01 - BASIC ELECTRIC ELEMENTS

Masahiro Nakaharada

Person

Patents Grantslast 30 patents

Method of measuring a temperature of a heat plate and method thereof

Substrate treatment system, substrate transfer method and computer...

Substrate treatment system, substrate transfer method and computer...

Substrate treatment system, substrate transfer method and computer...

Substrate treatment system, substrate transfer method, and a non-tr...

Substrate treatment system, substrate transfer method and non-trans...

Substrate processing apparatus, substrate processing method and sto...

Substrate transfer method and apparatus

Substrate carrying apparatus, substrate carrying method, and coatin...

Coating and developing system and coating and developing method

Patents Applicationslast 30 patents

METHOD OF MEASURING A TEMPERATURE OF A HEAT PLATE AND METHOD THEREOF

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND A NON-TR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND NON-TRANS...

SUBSTRATE TRANSFER METHOD AND APPARATUS

Substrate carrying apparatus, sustrate carrying method, and coating...

Coating and developing system and coating and developing method