Masahiro Nasu

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate transfer method and stora...
- Patent number 9,484,235
- Issue date Nov 1, 2016
- Tokyo Electron Limited
- Kouichi Itou
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND STORA...
- Publication number 20140093984
- Publication date Apr 3, 2014
- TOKYO ELECTRON LIMITED
- Kouichi Itou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...