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Masahiro Nonomura
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Subtrate treatment apparatus
Patent number
8,127,391
Issue date
Mar 6, 2012
Dainippon Screen Mfg. Co., Ltd.
Masahiro Nonomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and vessel for storing a substrate cleaning brush
Patent number
5,881,876
Issue date
Mar 16, 1999
Dainippon Screen Mfg. Co., Ltd.
Masahiro Nonomura
G11 - INFORMATION STORAGE
Information
Patent Grant
Substrate holder for a substrate spin treating apparatus
Patent number
5,601,645
Issue date
Feb 11, 1997
Dainippon Screen Mfg. Co., Ltd.
Masahiro Nonomura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR AND METHOD OF CLEANING SUBSTRATE
Publication number
20090199869
Publication date
Aug 13, 2009
Dainippon Screen Mfg. Co., Ltd.
Yoshikazu Kago
B08 - CLEANING
Information
Patent Application
SUBTRATE TREATMENT APPARATUS
Publication number
20090025763
Publication date
Jan 29, 2009
Masahiro Nonomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for and method of cleaning substrate
Publication number
20050183754
Publication date
Aug 25, 2005
Yoshikazu Kago
B08 - CLEANING