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Masahiro Numakura
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Miyagi-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Container, container partition plate, substrate processing system,...
Patent number
11,735,448
Issue date
Aug 22, 2023
Tokyo Electron Limited
Toshiaki Toyomaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
9,824,861
Issue date
Nov 21, 2017
Tokyo Electron Limited
Masahiro Numakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of inspecting substrate processing apparatus and storage med...
Patent number
9,305,814
Issue date
Apr 5, 2016
Tokyo Electron Limited
Masahiro Numakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate receiving method and controller
Patent number
8,731,698
Issue date
May 20, 2014
Tokyo Electron Limited
Shinobu Onodera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System, method and storage medium for controlling a processing system
Patent number
8,571,703
Issue date
Oct 29, 2013
Tokyo Electron Limited
Masahiro Numakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control device and control method of plasma processing system, and...
Patent number
8,452,455
Issue date
May 28, 2013
Tokyo Electron Limited
Hiroaki Mochizuki
G05 - CONTROLLING REGULATING
Information
Patent Grant
Cleaning method for substrate processing system, storage medium, an...
Patent number
8,382,910
Issue date
Feb 26, 2013
Tokyo Electron Limited
Masahiro Numakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate transfer method adopte...
Patent number
8,145,339
Issue date
Mar 27, 2012
Tokyo Electron Limited
Kiyohito Iijima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for controlling processing system, method for controlling pr...
Patent number
8,055,378
Issue date
Nov 8, 2011
Tokyo Electron Limited
Masahiro Numakura
G05 - CONTROLLING REGULATING
Information
Patent Grant
Device and method for controlling substrate processing apparatus
Patent number
7,738,987
Issue date
Jun 15, 2010
Tokyo Electron Limited
Masahiro Numakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, control method for the apparatus, a...
Patent number
7,640,072
Issue date
Dec 29, 2009
Tokyo Electron Limited
Noriaki Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, control method for the apparatus, a...
Patent number
7,455,747
Issue date
Nov 25, 2008
Tokyo Electron Limited
Noriaki Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor production system, cluster tool, control method of se...
Patent number
7,367,769
Issue date
May 6, 2008
Tokyo Electron Limited
Tomoyuki Ishii
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CONTAINER, CONTAINER PARTITION PLATE, SUBSTRATE PROCESSING SYSTEM,...
Publication number
20230290660
Publication date
Sep 14, 2023
TOKYO ELECTRON LIMITED
Toshiaki TOYOMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTAINER, CONTAINER PARTITION PLATE, SUBSTRATE PROCESSING SYSTEM,...
Publication number
20200286752
Publication date
Sep 10, 2020
TOKYO ELECTRON LIMITED
Toshiaki TOYOMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM OF PROCESSING SUBSTRATE, TRANSFER METHOD, TRANSFER PROGRAM,...
Publication number
20200194296
Publication date
Jun 18, 2020
TOKYO ELECTRON LIMITED
Masahiro NUMAKURA
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20160190024
Publication date
Jun 30, 2016
TOKYO ELECTRON LIMITED
Masahiro NUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE RECEIVING METHOD AND CONTROLLER
Publication number
20100268364
Publication date
Oct 21, 2010
TOKYO ELECTRON LIMITED
Shinobu Onodera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD AND STORAGE MEDIUM
Publication number
20100089423
Publication date
Apr 15, 2010
TOKYO ELECTRON LIMITED
Kiyohito IIJIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL DEVICE AND CONTROL METHOD OF PLASMA PROCESSING SYSTEM, AND...
Publication number
20100004785
Publication date
Jan 7, 2010
TOKYO ELECTRON LIMITED
Hiroaki MOCHIZUKI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD ADOPTE...
Publication number
20090269171
Publication date
Oct 29, 2009
TOKYO ELECTRON LIMITED
Kiyohito IIJIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD FOR SUBSTRATE PROCESSING SYSTEM, STORAGE MEDIUM, AN...
Publication number
20090229635
Publication date
Sep 17, 2009
TOKYO ELECTRON LIMITED
Masahiro NUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM, METHOD AND STORAGE MEDIUM FOR CONTROLLING A PROCESSING SYSTEM
Publication number
20090076648
Publication date
Mar 19, 2009
TOKYO ELECTRON LIMITED
Masahiro NUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR CONTROLLING PROCESSING SYSTEM, METHOD FOR CONTROLLING PR...
Publication number
20090076647
Publication date
Mar 19, 2009
TOKYO ELECTRON LIMITED
Masahiro NUMAKURA
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD FOR THE APPARATUS, A...
Publication number
20080228311
Publication date
Sep 18, 2008
TOKYO ELECTRON LIMITED
Noriaki Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS
Publication number
20080125899
Publication date
May 29, 2008
TOKYO ELECTRON LIMITED
Masahiro NUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of inspecting substrate processing apparatus and storage med...
Publication number
20060181699
Publication date
Aug 17, 2006
TOKYO ELECTRON LIMITED
Masahiro Numakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20050129839
Publication date
Jun 16, 2005
TOKYO ELECTRON LIMITED
Masahiro Numakura
G05 - CONTROLLING REGULATING
Information
Patent Application
Substrate processing apparatus, control method for the apparatus, a...
Publication number
20050124084
Publication date
Jun 9, 2005
TOKYO ELECTRON LIMITED
Noriaki Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor production system, cluster tool, control method of se...
Publication number
20040092069
Publication date
May 13, 2004
Tomoyuki Ishii
G05 - CONTROLLING REGULATING