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Masahiro Osawa
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Minato-ku, JP
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last 30 patents
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Patent Grant
Wafer mapping apparatus and load port including same
Patent number
9,239,228
Issue date
Jan 19, 2016
SINFONIA TECHNOLOGY CO., LTD.
Mitsuo Natsume
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
WAFER MAPPING APPARATUS AND LOAD PORT INCLUDING SAME
Publication number
20150308812
Publication date
Oct 29, 2015
SINFONIA TECHNOLOGY CO., LTD.
Mitsuo NATSUME
G01 - MEASURING TESTING