-
-
-
DEPOSITION METHOD AND DEPOSITION APPARATUS
-
Publication number 20200328062
-
Publication date Oct 15, 2020
-
Canon ANELVA Corporation
-
Hiroshi Yakushiji
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
-
DEPOSITION APPARATUS
-
Publication number 20170202077
-
Publication date Jul 13, 2017
-
Canon ANELVA Corporation
-
Masahiro ATSUMI
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
DEPOSITION APPARATUS
-
Publication number 20160060750
-
Publication date Mar 3, 2016
-
Canon ANELVA Corporation
-
Teruaki ONO
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
PROCESSING APPARATUS
-
Publication number 20160056026
-
Publication date Feb 25, 2016
-
Canon ANELVA Corporation
-
Hidetomo NARADATE
-
H01 - BASIC ELECTRIC ELEMENTS
-
SPUTTERING APPARATUS
-
Publication number 20160027624
-
Publication date Jan 28, 2016
-
Canon ANELVA Corporation
-
Susumu KARINO
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
DEPOSITION APPARATUS
-
Publication number 20150083586
-
Publication date Mar 26, 2015
-
Canon ANELVA Corporation
-
Teruaki ONO
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
FILM FORMING APPARATUS
-
Publication number 20130133571
-
Publication date May 30, 2013
-
ANELVA CORPORATION
-
Shinji Furukawa
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
FILM FORMING APPARATUS
-
Publication number 20110192344
-
Publication date Aug 11, 2011
-
ANELVA CORPORATION
-
Shinji Furukawa
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
-
-
-
-
SPUTTERING APPARATUS AND SPUTTERING METHOD
-
Publication number 20090134010
-
Publication date May 28, 2009
-
Canon ANELVA Corporation
-
Masahiro Shibamoto
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
SPUTTERING APPARATUS AND SPUTTERING METHOD
-
Publication number 20090134012
-
Publication date May 28, 2009
-
Canon ANELVA Corporation
-
Masahiro SHIBAMOTO
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
SPUTTERING SYSTEM
-
Publication number 20080217170
-
Publication date Sep 11, 2008
-
CANON ANELVA CORPORATION
-
Masahiro Shibamoto
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
FILM FORMING APPARATUS
-
Publication number 20080178796
-
Publication date Jul 31, 2008
-
ANELVA CORPORATION
-
Shinji Furukawa
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
Film forming apparatus
-
Publication number 20050115830
-
Publication date Jun 2, 2005
-
ANELVA CORPORATION
-
Shinji Furukawa
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Sputtering system
-
Publication number 20050011756
-
Publication date Jan 20, 2005
-
ANELVA CORPORATION
-
Masahiro Shibamoto
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-