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Masahiro Sumiya
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,154,765
Issue date
Nov 26, 2024
HITACHI HIGH-TECH CORPORATION
Nanako Tamari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method for releasing sample
Patent number
12,148,633
Issue date
Nov 19, 2024
HITACHI HIGH-TECH CORPORATION
Masaki Ishiguro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
12,112,925
Issue date
Oct 8, 2024
HITACHI HIGH-TECH CORPORATION
Masaki Ishiguro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and prediction method of the condition...
Patent number
12,080,529
Issue date
Sep 3, 2024
HITACHI HIGH-TECH CORPORATION
Yoshito Kamaji
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
State prediction apparatus and semiconductor manufacturing apparatus
Patent number
12,050,455
Issue date
Jul 30, 2024
HITACHI HIGH-TECH CORPORATION
Masaki Ishiguro
G05 - CONTROLLING REGULATING
Information
Patent Grant
Diagnosis apparatus, plasma processing apparatus and diagnosis method
Patent number
12,040,167
Issue date
Jul 16, 2024
HITACHI HIGH-TECH CORPORATION
Shota Umeda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma processing method
Patent number
11,742,214
Issue date
Aug 29, 2023
HITACHI HIGH-TECH CORPORATION
Junya Sasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for releasing sample and plasma processing apparatus using same
Patent number
11,664,233
Issue date
May 30, 2023
HITACHI HIGH-TECH CORPORATION
Masaki Ishiguro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and data analysis apparatus
Patent number
11,538,671
Issue date
Dec 27, 2022
HITACHI HIGH-TECH CORPORATION
Ryoji Asakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,424,108
Issue date
Aug 23, 2022
HITACHI HIGH-TECH CORPORATION
Kazuyuki Ikenaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
11,355,324
Issue date
Jun 7, 2022
HITACHI HIGH-TECH CORPORATION
Kosa Hirota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,315,792
Issue date
Apr 26, 2022
HITACHI HIGH-TECH CORPORATION
Masaki Ishiguro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,257,661
Issue date
Feb 22, 2022
HITACHI HIGH-TECH CORPORATION
Masaki Ishiguro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and prediction apparatus of the conditi...
Patent number
11,107,664
Issue date
Aug 31, 2021
HITACHI HIGH-TECH CORPORATION
Yoshito Kamaji
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for releasing sample and plasma processing apparatus using same
Patent number
11,107,694
Issue date
Aug 31, 2021
HITACHI HIGH-TECH CORPORATION
Masaki Ishiguro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and prediction method of the condition...
Patent number
10,886,110
Issue date
Jan 5, 2021
HITACHI HIGH-TECH CORPORATION
Yoshito Kamaji
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma processing apparatus and method for releasing sample
Patent number
10,825,700
Issue date
Nov 3, 2020
HITACHI HIGH-TECH CORPORATION
Masaki Ishiguro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and data analysis apparatus
Patent number
10,510,519
Issue date
Dec 17, 2019
Hitachi High-Technologies Corporation
Ryoji Asakura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for releasing sample and plasma processing apparatus using same
Patent number
10,490,412
Issue date
Nov 26, 2019
Hitachi High-Technologies Corporation
Masaki Ishiguro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,395,935
Issue date
Aug 27, 2019
Hitachi High-Technologies Corporation
Masaki Ishiguro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
10,184,173
Issue date
Jan 22, 2019
Hitachi High-Technologies Corporation
Takahiro Yonemoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
9,960,031
Issue date
May 1, 2018
Hitachi High-Technologies Corporation
Masahiro Sumiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
9,941,133
Issue date
Apr 10, 2018
Hitachi High-Technologies Corporation
Masaki Ishiguro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
9,496,147
Issue date
Nov 15, 2016
Hitachi High-Technologies Corporation
Masahiro Sumiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
8,557,709
Issue date
Oct 15, 2013
Hitachi High-Technologies Corporation
Masahiro Sumiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
8,236,701
Issue date
Aug 7, 2012
Hitachi High-Technologies Corporation
Masahiro Sumiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and apparatus
Patent number
7,771,608
Issue date
Aug 10, 2010
Hitachi High-Technologies Corporation
Masahiro Sumiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus having high frequency power source with...
Patent number
7,615,132
Issue date
Nov 10, 2009
Hitachi High-Technologies Corporation
Naoki Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method of insulating film
Patent number
7,585,776
Issue date
Sep 8, 2009
Hitachi High-Technologies Corporation
Nobuyuki Negishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus using active matching
Patent number
7,373,899
Issue date
May 20, 2008
Hitachi High-Technologies Corporation
Masahiro Sumiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARAT...
Publication number
20240339308
Publication date
Oct 10, 2024
Satoru Matsukura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIAGNOSTIC DEVICE, SEMICONDUCTOR MANUFACTURING EQUIPMENT SYSTEM, SE...
Publication number
20240321608
Publication date
Sep 26, 2024
Hitachi High-Tech Corporation
Pushe ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIAGNOSTIC APPARATUS AND DIAGNOSTIC METHOD, AND SEMICONDUCTOR MANUF...
Publication number
20240310821
Publication date
Sep 19, 2024
Hitachi High-Tech Corporation
Masaaki YAMAMOTO
G05 - CONTROLLING REGULATING
Information
Patent Application
APPARATUS DIAGNOSTIC SYSTEM, APPARATUS DIAGNOSTIC APPARATUS, SEMICO...
Publication number
20240310827
Publication date
Sep 19, 2024
Hitachi High-Tech Corporation
Nanako Tamari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIAGNOSIS DEVICE, DIAGNOSIS METHOD, PLASMA PROCESSING APPARATUS, AN...
Publication number
20240213003
Publication date
Jun 27, 2024
Hitachi High-Tech Corporation
Shota UMEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND MEMBER OF PLASMA PROCESSING CHAMBER
Publication number
20230207279
Publication date
Jun 29, 2023
HITACHI HIGH-TECH CORPORATION
Kazuhiro UEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230110096
Publication date
Apr 13, 2023
Hitachi High-Tech Corporation
Anil PANDEY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS DIAGNOSTIC APPARATUS, APPARATUS DIAGNOSTIC METHOD, PLASMA...
Publication number
20220399182
Publication date
Dec 15, 2022
Hitachi High-Tech Corporation
Shota Umeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20220375726
Publication date
Nov 24, 2022
Kosa Hirota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20220359166
Publication date
Nov 10, 2022
Hitachi High-Tech Corporation
Nanako Tamari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20220359172
Publication date
Nov 10, 2022
HITACHI HIGH-TECH CORPORATION
Kazuyuki Ikenaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20220262606
Publication date
Aug 18, 2022
HITACHI HIGH-TECH CORPORATION
Kosa Hirota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIAGNOSIS APPARATUS, PLASMA PROCESSING APPARATUS AND DIAGNOSIS METHOD
Publication number
20220157580
Publication date
May 19, 2022
Hitachi High-Tech Corporation
Shota Umeda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20220139678
Publication date
May 5, 2022
HITACHI HIGH-TECH CORPORATION
Masaki ISHIGURO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR RELEASING SAMPLE AND PLASMA PROCESSING APPARATUS USING SAME
Publication number
20210358758
Publication date
Nov 18, 2021
HITACHI HIGH-TECH CORPORATION
Masaki ISHIGURO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20210358722
Publication date
Nov 18, 2021
Hitachi High-Technologies Corporation
Anil Pandey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PREDICTION METHOD OF THE CONDITION...
Publication number
20210082673
Publication date
Mar 18, 2021
HITACHI HIGH-TECH CORPORATION
Yoshito Kamaji
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR RELEASING SAMPLE
Publication number
20210013060
Publication date
Jan 14, 2021
HITACHI HIGH-TECH CORPORATION
Masaki ISHIGURO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20200294777
Publication date
Sep 17, 2020
Hitachi High-Technologies Corporation
Kosa HIROTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STATE PREDICTION APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20200064820
Publication date
Feb 27, 2020
Hitachi High-Technologies Corporation
Masaki ISHIGURO
G05 - CONTROLLING REGULATING
Information
Patent Application
PLASMA PROCESSING APPARATUS AND DATA ANALYSIS APPARATUS
Publication number
20200066500
Publication date
Feb 27, 2020
Hitachi High-Technologies Corporation
Ryoji ASAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR RELEASING SAMPLE AND PLASMA PROCESSING APPARATUS USING SAME
Publication number
20200058511
Publication date
Feb 20, 2020
Hitachi High-Technologies Corporation
Masaki ISHIGURO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20190333772
Publication date
Oct 31, 2019
Hitachi High-Technologies Corporation
Masaki ISHIGURO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND MEMBER OF PLASMA PROCESSING CHAMBER
Publication number
20190326101
Publication date
Oct 24, 2019
Hitachi High-Technologies Corporation
Kazuhiro UEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PREDICTION APPARATUS OF THE CONDITI...
Publication number
20190237309
Publication date
Aug 1, 2019
Hitachi High-Technologies Corporation
Yoshito KAMAJI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PREDICTION METHOD OF THE CONDITION...
Publication number
20190088455
Publication date
Mar 21, 2019
Hitachi High-Technologies Corporation
Yoshito KAMAJI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20180190502
Publication date
Jul 5, 2018
Hitachi High-Technologies Corporation
Masaki ISHIGURO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20180082855
Publication date
Mar 22, 2018
Hitachi High-Technologies Corporation
Junya SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR RELEASING SAMPLE
Publication number
20180040491
Publication date
Feb 8, 2018
Hitachi High-Technologies Corporation
Masaki ISHIGURO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR RELEASING SAMPLE AND PLASMA PROCESSING APPARATUS USING SAME
Publication number
20170194157
Publication date
Jul 6, 2017
Hitachi High-Technologies Corporation
Masaki ISHIGURO
H01 - BASIC ELECTRIC ELEMENTS