TREA

Masahiro TABATA

Follow

Person

  • Miyagi, JP
People

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    APPARATUS FOR SUBSTRATE PROCESSING
    • Publication number 20230010069
    • Publication date Jan 12, 2023
    • TOKYO ELECTRON LIMITED
    • Masahiro Tabata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS FOR PROCESSING SUBSTRATE
    • Publication number 20220293428
    • Publication date Sep 15, 2022
    • TOKYO ELECTRON LIMITED
    • Masahiro Tabata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WORKPIECE PROCESSING METHOD
    • Publication number 20220254635
    • Publication date Aug 11, 2022
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20220165579
    • Publication date May 26, 2022
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20220115241
    • Publication date Apr 14, 2022
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD AND APPARATUS FOR ETCHING TARGET OBJECT
    • Publication number 20220005700
    • Publication date Jan 6, 2022
    • TOKYO ELECTRON LIMITED
    • Sho Kumakura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM ETCHING METHOD FOR ETCHING FILM
    • Publication number 20210384039
    • Publication date Dec 9, 2021
    • TOKYO ELECTRON LIMITED
    • Takayuki HOSHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR PROCESSING WORKPIECE
    • Publication number 20210327719
    • Publication date Oct 21, 2021
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS FOR PROCESSING SUBSTRATE
    • Publication number 20210025060
    • Publication date Jan 28, 2021
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF PROCESSING TARGET OBJECT
    • Publication number 20200381263
    • Publication date Dec 3, 2020
    • TOKYO ELECTRON LIMITED
    • Masahiro Tabata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS FOR SUBSTRATE PROCESSING
    • Publication number 20200381265
    • Publication date Dec 3, 2020
    • TOKYO ELECTRON LIMITED
    • Masahiro Tabata
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    WORKPIECE PROCESSING METHOD
    • Publication number 20200343091
    • Publication date Oct 29, 2020
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20200273699
    • Publication date Aug 27, 2020
    • TOKYO ELECTRON LIMITED
    • Sho Kumakura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM ETCHING METHOD FOR ETCHING FILM
    • Publication number 20200234970
    • Publication date Jul 23, 2020
    • TOKYO ELECTRON LIMITED
    • Takayuki HOSHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS FOR SELECTIVELY ETCHING FIRST REGION MADE OF SILICON NITR...
    • Publication number 20200185238
    • Publication date Jun 11, 2020
    • TOKYO ELECTRON LIMITED
    • Masahiro Tabata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF PROCESSING TARGET OBJECT
    • Publication number 20200144071
    • Publication date May 7, 2020
    • TOKYO ELECTRON LIMITED
    • Yoshihide Kihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WORKPIECE PROCESSING METHOD
    • Publication number 20200135480
    • Publication date Apr 30, 2020
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20200111679
    • Publication date Apr 9, 2020
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD AND APPARATUS FOR ETCHING TARGET OBJECT
    • Publication number 20200058512
    • Publication date Feb 20, 2020
    • TOKYO ELECTRON LIMITED
    • Sho Kumakura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20200035501
    • Publication date Jan 30, 2020
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20200035503
    • Publication date Jan 30, 2020
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20190393031
    • Publication date Dec 26, 2019
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
    • Publication number 20190382897
    • Publication date Dec 19, 2019
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20190378730
    • Publication date Dec 12, 2019
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR ETCHING ORGANIC REGION
    • Publication number 20190326106
    • Publication date Oct 24, 2019
    • TOKYO ELECTRON LIMITED
    • Ryuichi ASAKO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF PROCESSING TARGET OBJECT
    • Publication number 20190326125
    • Publication date Oct 24, 2019
    • TOKYO ELECTRON LIMITED
    • Yoshihide Kihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20190326104
    • Publication date Oct 24, 2019
    • TOKYO ELECTRON LIMITED
    • Ryuichi ASAKO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20190259626
    • Publication date Aug 22, 2019
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR PROCESSING WORKPIECE
    • Publication number 20190259627
    • Publication date Aug 22, 2019
    • TOKYO ELECTRON LIMITED
    • Masahiro TABATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF SELECTIVELY ETCHING FIRST REGION MADE OF SILICON NITRIDE...
    • Publication number 20190252217
    • Publication date Aug 15, 2019
    • Masahiro Tabata
    • H01 - BASIC ELECTRIC ELEMENTS