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Masahiro Totuka
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Tokyo, JP
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last 30 patents
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Patent Grant
Silicon nitride film forming method
Patent number
7,704,556
Issue date
Apr 27, 2010
Canon Anelva Corporation
Hitoshi Morisaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Silicon Nitride Film Forming Method
Publication number
20080020140
Publication date
Jan 24, 2008
Hitoshi Morisaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Silicon nitride film forming apparatus and film forming method
Publication number
20030198743
Publication date
Oct 23, 2003
Hitoshi Morisaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...