Masahiro YAMAZAKI

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Sendai City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for etching oxide semiconductor film and plasma processing a...
- Patent number 12,068,171
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Masahiro Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method and plasma processing apparatus
- Patent number 12,002,664
- Issue date Jun 4, 2024
- Tokyo Electron Limited
- Masahiro Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method and plasma processing apparatus
- Patent number 11,524,321
- Issue date Dec 13, 2022
- Tokyo Electron Limited
- Masahiro Yamazaki
- B08 - CLEANING
Information Patent Grant
Plasma processing apparatus
- Patent number 9,343,270
- Issue date May 17, 2016
- Tokyo Electron Limited
- Toshihisa Nozawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CLEANING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240274415
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Masahiro YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20230074399
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Masahiro YAMAZAKI
- B08 - CLEANING
Information Patent Application
METHOD FOR ETCHING OXIDE SEMICONDUCTOR FILM AND PLASMA PROCESSING A...
- Publication number 20210242036
- Publication date Aug 5, 2021
- TOKYO ELECTRON LIMITED
- Masahiro YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210001383
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Masahiro YAMAZAKI
- B08 - CLEANING
Information Patent Application
METHOD FOR INJECTING DOPANT INTO SUBSTRATE TO BE PROCESSED, AND PLA...
- Publication number 20150132929
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Masahiro Horigome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20140238607
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Toshihisa NOZAWA
- H01 - BASIC ELECTRIC ELEMENTS