Masahito EGUCHI

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Patents Grantslast 30 patents

Information Patent Grant
Method for producing electrostatic chuck and electrostatic chuck
- Patent number 9,394,206
- Issue date Jul 19, 2016
- NGK Insulators, Ltd.
- Kazuhiro Nobori
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Disassembly method and reuse method of substrate mounting member
- Patent number 7,763,146
- Issue date Jul 27, 2010
- NGK Insulators, Ltd.
- Masahito Eguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic adsorption device
- Patent number 6,728,091
- Issue date Apr 27, 2004
- NGK Insulators, Ltd.
- Hideyoshi Tsuruta
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PRODUCING ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
- Publication number 20120248716
- Publication date Oct 4, 2012
- NGK Insulators, Ltd.
- Kazuhiro NOBORI
- B32 - LAYERED PRODUCTS
Information Patent Application
DISASSEMBLY METHOD AND REUSE METHOD OF SUBSTRATE MOUNTING MEMBER
- Publication number 20070103844
- Publication date May 10, 2007
- NGK Insulators, Ltd.
- Masahito EGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic adsorption device
- Publication number 20030059627
- Publication date Mar 27, 2003
- NGK Insulators, Ltd.
- Hideyoshi Tsuruta
- H01 - BASIC ELECTRIC ELEMENTS