TREA

Masahito Hiratsuka

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  • Kofu, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 5,271,788
    • Issue date Dec 21, 1993
    • Tokyo Electron Limited
    • Makoto Hasegawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method
    • Patent number 5,259,923
    • Issue date Nov 9, 1993
    • Tokyo Electron Limited
    • Masaru Hori
    • H01 - BASIC ELECTRIC ELEMENTS