Masahito HIROSHIMA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus and imprint method
- Patent number 10,131,135
- Issue date Nov 20, 2018
- TOSHIBA MEMORY CORPORATION
- Yasuo Matsuoka
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Phase shift mask and method for manufacturing the same, and method...
- Patent number 8,124,303
- Issue date Feb 28, 2012
- Elpida Memory, Inc.
- Masahito Hiroshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus including defect correcting system which repeats a correc...
- Patent number 8,090,188
- Issue date Jan 3, 2012
- Elpida Memory, Inc.
- Masahito Hiroshima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Fine resist pattern forming method and nanoimprint mold structure
- Patent number 7,922,960
- Issue date Apr 12, 2011
- Elpida Memory, Inc.
- Masahito Hiroshima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 7,776,495
- Issue date Aug 17, 2010
- Elpida Memory, Inc.
- Masahito Hiroshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable shaped electron beam lithography system and method for man...
- Patent number 7,714,308
- Issue date May 11, 2010
- Elpida Memory, Inc.
- Masahito Hiroshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 7,438,998
- Issue date Oct 21, 2008
- Elpida Memory, Inc.
- Masahito Hiroshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 7,208,788
- Issue date Apr 24, 2007
- Elpida Memory, Inc.
- Masahito Hiroshima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT APPARATUS AND IMPRINT METHOD
- Publication number 20170021607
- Publication date Jan 26, 2017
- Kabushiki Kaisha Toshiba
- Yasuo MATSUOKA
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
PHASE SHIFT MASK AND METHOD FOR MANUFACTURING THE SAME, AND METHOD...
- Publication number 20120058421
- Publication date Mar 8, 2012
- Elpida Memory, Inc.
- Masahito HIROSHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHASE SHIFT MASK AND METHOD FOR MANUFACTURING THE SAME, AND METHOD...
- Publication number 20100159369
- Publication date Jun 24, 2010
- Elpida Memory, Inc.
- Masahito HIROSHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing phase shift photomask
- Publication number 20090092906
- Publication date Apr 9, 2009
- ELPIDA MEMORY, INC.,
- Masahito Hiroshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fine resist pattern forming method and nanoimprint mold structure
- Publication number 20090001634
- Publication date Jan 1, 2009
- Elpida Memory, Inc.
- Masahito Hiroshima
- B82 - NANO-TECHNOLOGY
Information Patent Application
Variable shaped electron beam lithography system and method for man...
- Publication number 20080054196
- Publication date Mar 6, 2008
- Elpida Memory, Inc.
- Masahito Hiroshima
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus for correcting defects in a reticle pattern and correctin...
- Publication number 20080050010
- Publication date Feb 28, 2008
- Elpida Memory, Inc.
- Masahito Hiroshima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Semiconductor device and manufacturing method thereof
- Publication number 20070172746
- Publication date Jul 26, 2007
- Elpida Memory, Inc.
- Masahito Hiroshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Semiconductor device and manufacturing method thereof
- Publication number 20050116272
- Publication date Jun 2, 2005
- Elpida Memory, Inc.
- Masahito Hiroshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing semiconductor device
- Publication number 20050084806
- Publication date Apr 21, 2005
- ELPIDA MEMORY INC.
- Masahito Hiroshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing semiconductor device
- Publication number 20050074679
- Publication date Apr 7, 2005
- ELPIDA MEMORY, INC.
- Masahito Hiroshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Masahito HIROSHIMA

Person

Patents Grantslast 30 patents

Imprint apparatus and imprint method

Phase shift mask and method for manufacturing the same, and method...

Apparatus including defect correcting system which repeats a correc...

Fine resist pattern forming method and nanoimprint mold structure

Semiconductor device and manufacturing method thereof

Variable shaped electron beam lithography system and method for man...

Method of manufacturing semiconductor device

Semiconductor device and manufacturing method thereof

Patents Applicationslast 30 patents

IMPRINT APPARATUS AND IMPRINT METHOD

PHASE SHIFT MASK AND METHOD FOR MANUFACTURING THE SAME, AND METHOD...

PHASE SHIFT MASK AND METHOD FOR MANUFACTURING THE SAME, AND METHOD...

Method of manufacturing phase shift photomask

Fine resist pattern forming method and nanoimprint mold structure

Variable shaped electron beam lithography system and method for man...

Apparatus for correcting defects in a reticle pattern and correctin...

Semiconductor device and manufacturing method thereof

Semiconductor device and manufacturing method thereof

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device