Masahito OZAWA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Alignment processing mechanism and semiconductor processing device...
- Patent number 6,702,865
- Issue date Mar 9, 2004
- Tokyo Electron Limited
- Masahito Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process system with transfer unit for object to be processed
- Patent number 6,395,094
- Issue date May 28, 2002
- Tokyo Electron Limited
- Keiichi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auxiliary vacuum chamber and vacuum processing unit using same
- Patent number 6,234,107
- Issue date May 22, 2001
- Tokyo Electron Limited
- Keiichi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for regulating pressure in two chambers
- Patent number 5,913,978
- Issue date Jun 22, 1999
- Tokyo Electron Ltd.
- Susumu Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-chamber system provided with carrier units
- Patent number 5,474,410
- Issue date Dec 12, 1995
- Tel-Varian Limited
- Masahito Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface processing apparatus
- Patent number 5,332,442
- Issue date Jul 26, 1994
- Tokyo Electron Kabushiki Kaisha
- Masao Kubodera
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20130180448
- Publication date Jul 18, 2013
- TOKYO ELECTRON LIMITED
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER DEVICE AND TARGET OBJECT PROCESSING APPARATUS INCLUDING SAME
- Publication number 20110142579
- Publication date Jun 16, 2011
- TOKYO ELECTRON LIMITED
- Hiromitsu SAKAUE
- H01 - BASIC ELECTRIC ELEMENTS