Masahito Shinohara

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Utsunomiya, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus
- Patent number 8,785,878
- Issue date Jul 22, 2014
- Canon Kabushiki Kaisha
- Keiichi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment apparatus, exposure apparatus and device fabrication method
- Patent number 7,271,875
- Issue date Sep 18, 2007
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20130143161
- Publication date Jun 6, 2013
- Canon Kabushiki Kaisha
- Keiichi ARITA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM IRRADIATION APPARATUS, CHARGED PARTICLE BEAM...
- Publication number 20130071791
- Publication date Mar 21, 2013
- Canon Kabushiki Kaisha
- Keiichi Arita
- B82 - NANO-TECHNOLOGY
Information Patent Application
Alignment apparatus, exposure apparatus and device fabrication method
- Publication number 20060044538
- Publication date Mar 2, 2006
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY