Membership
Tour
Register
Log in
Masahito Sugiura
Follow
Person
Yamanashi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method and device for forming graphene structure
Patent number
12,014,907
Issue date
Jun 18, 2024
Tokyo Electron Limited
Ryota Ifuku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing apparatus and film forming method
Patent number
11,972,929
Issue date
Apr 30, 2024
Tokyo Electron Limited
Makoto Wada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of making a semiconductor device including a graphene barrie...
Patent number
11,302,576
Issue date
Apr 12, 2022
Tokyo Electron Limited
Makoto Wada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming carbon nanotubes and carbon nanotube film formin...
Patent number
10,041,174
Issue date
Aug 7, 2018
Tokyo Electron Limited
Takashi Matsumoto
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for forming carbon nanotubes and carbon nanotube film formin...
Patent number
9,059,178
Issue date
Jun 16, 2015
Tokyo Electron Limited
Takashi Matsumoto
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for forming tungsten film at a surface of a processing targe...
Patent number
8,168,539
Issue date
May 1, 2012
Tokyo Electron Limited
Masahito Sugiura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing metal layers from metal-carbonyl precursors
Patent number
7,078,341
Issue date
Jul 18, 2006
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method, and film modifying method
Patent number
7,037,560
Issue date
May 2, 2006
Tokyo Electron Limited
Hiroshi Shinriki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching method
Patent number
7,030,028
Issue date
Apr 18, 2006
Tokyo Electron Limited
Takuya Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-pressure deposition of metal layers from metal-carbonyl precursors
Patent number
6,989,321
Issue date
Jan 24, 2006
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fabrication process of a semiconductor device
Patent number
6,890,848
Issue date
May 10, 2005
Tokyo Electron Limited
Kaoru Maekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method by radiating a plasma on a surface of a low die...
Patent number
6,800,546
Issue date
Oct 5, 2004
Tokyo Electron Limited
Nobuo Konishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus and processing method
Patent number
6,467,491
Issue date
Oct 22, 2002
Tokyo Electron Limited
Masahito Sugiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Single-substrate-processing CVD method of forming film containing m...
Patent number
6,428,850
Issue date
Aug 6, 2002
Tokyo Electron Limited
Hiroshi Shinriki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Single-substrate-heat-processing method for performing reformation...
Patent number
6,232,248
Issue date
May 15, 2001
Tokyo Electron Limited
Hiroshi Shinriki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and method, and film modifying apparatus and...
Patent number
6,143,081
Issue date
Nov 7, 2000
Tokyo Electron Limited
Hiroshi Shinriki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Single-substrate-processing CVD apparatus and method
Patent number
6,126,753
Issue date
Oct 3, 2000
Tokyo Electron Limited
Hiroshi Shinriki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PRE-COATING METHOD AND PROCESSING APPARATUS
Publication number
20230167547
Publication date
Jun 1, 2023
Tokyo Electron Limited
Ryota IFUKU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
Publication number
20230042099
Publication date
Feb 9, 2023
Tokyo Electron Limited
Makoto WADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING APPARATUS AND FILM FORMING METHOD
Publication number
20220316065
Publication date
Oct 6, 2022
TOKYO ELECTRON LIMITED
Makoto WADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR FORMING GRAPHENE STRUCTURE
Publication number
20220223407
Publication date
Jul 14, 2022
Tokyo Electron Limited
Ryota IFUKU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR FORMING HEXAGONAL BORON NITRIDE FILM
Publication number
20220165568
Publication date
May 26, 2022
TOKYO ELECTRON LIMITED
Nobutake KABUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND PROCESSING APPARATUS
Publication number
20210164103
Publication date
Jun 3, 2021
TOKYO ELECTRON LIMITED
Ryota IFUKU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device and Method of Manufacturing the Same
Publication number
20200303251
Publication date
Sep 24, 2020
TOKYO ELECTRON LIMITED
Makoto WADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING CARBON NANOTUBES AND CARBON NANOTUBE FILM FORMIN...
Publication number
20150259801
Publication date
Sep 17, 2015
TOKYO ELECTRON LIMITED
Takashi MATSUMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING CARBON NANOTUBES AND CARBON NANOTUBE FILM FORMIN...
Publication number
20130059091
Publication date
Mar 7, 2013
TOKYO ELECTRON LIMITED
Takashi MATSUMOTO
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD OF FORMING METALLIC FILM AND PROGRAM-STORING RECORDING MEDIUM
Publication number
20090246373
Publication date
Oct 1, 2009
Tokyo Electron Limited
Mitsuhiro Tachibana
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING TUNGSTEN FILM, FILM-FORMING APPARATUS, STORAGE M...
Publication number
20090045517
Publication date
Feb 19, 2009
TOKYO ELECTRON LIMITED
Masahito Sugiura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Single-substrate-heat-processing apparatus for performing reformati...
Publication number
20060081186
Publication date
Apr 20, 2006
Hiroshi Shinriki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of depositing metal layers from metal-carbonyl precursors
Publication number
20050079708
Publication date
Apr 14, 2005
TOKYO ELECTRON LIMITED
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Low-pressure deposition of metal layers from metal-carbonyl precursors
Publication number
20050070100
Publication date
Mar 31, 2005
TOKYO ELECTRON LIMITED
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film forming method and film forming apparatus
Publication number
20050026454
Publication date
Feb 3, 2005
Nobuo Konishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Single-substrate-heat-processing apparatus for performing reformati...
Publication number
20050016687
Publication date
Jan 27, 2005
TOKYO ELECTRON LIMITED
Hiroshi Shinriki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for forming film
Publication number
20040253777
Publication date
Dec 16, 2004
Hidenori Miyoshi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor device having a low dielectric film and fabrication p...
Publication number
20040065957
Publication date
Apr 8, 2004
Kaoru Maekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching method
Publication number
20040063331
Publication date
Apr 1, 2004
Takuya Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Film forming method and film forming apparatus
Publication number
20020177298
Publication date
Nov 28, 2002
Nobuo Konishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fabrication process of a semiconductor device
Publication number
20020164869
Publication date
Nov 7, 2002
Kaoru Maekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Single-substrate-heat-processing apparatus and method for performin...
Publication number
20010018267
Publication date
Aug 30, 2001
Hiroshi Shinriki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...