Masahito Yahagi

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Resist composition and method of forming resist pattern
- Patent number 12,099,298
- Issue date Sep 24, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Masaru Takeshita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist composition and method of forming resist pattern
- Patent number 11,693,313
- Issue date Jul 4, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito Yahagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist composition and method of forming resist pattern
- Patent number 11,656,549
- Issue date May 23, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito Yahagi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Resist composition and method of forming resist pattern
- Patent number 11,586,111
- Issue date Feb 21, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Yasuhiro Yoshii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist composition and method of forming resist pattern
- Patent number 11,392,033
- Issue date Jul 19, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Hitoshi Yamano
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Resist composition and method of forming resist pattern
- Patent number 11,372,329
- Issue date Jun 28, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito Yahagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist composition and method of forming resist pattern
- Patent number 11,275,306
- Issue date Mar 15, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Kojima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist composition and method for forming resist pattern
- Patent number 11,204,551
- Issue date Dec 21, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito Yahagi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Resist composition and method of forming resist pattern
- Patent number 11,187,981
- Issue date Nov 30, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Yoichi Hori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist composition, method of forming resist pattern, and polymer c...
- Patent number 10,976,661
- Issue date Apr 13, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Hiroto Yamazaki
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Resist composition and method of forming resist pattern
- Patent number 10,606,174
- Issue date Mar 31, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito Yahagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist composition, method for forming resist pattern, compound, an...
- Patent number 10,394,122
- Issue date Aug 27, 2019
- TOYKO OHKA KOGYO CO., LTD.
- Issei Suzuki
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Resist composition and method for forming resist pattern
- Patent number 10,241,406
- Issue date Mar 26, 2019
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito Yahagi
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Resist composition and method of forming resist pattern
- Patent number 10,101,658
- Issue date Oct 16, 2018
- Tokyo Ohka Kogyo Co., Ltd.
- Taku Hirayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of producing structure containing phase-separated structure...
- Patent number 10,066,096
- Issue date Sep 4, 2018
- Tokyo Ohka Kogyo Co., Ltd.
- Tsuyoshi Kurosawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Resist pattern forming method and developer for lithography
- Patent number 9,964,851
- Issue date May 8, 2018
- Tokyo Ohka Kogyo Co., Ltd.
- Kazufumi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of producing structure containing phase-separated structure...
- Patent number 9,821,338
- Issue date Nov 21, 2017
- TOKYO OHKA KOGYO., LTD.
- Hitoshi Yamano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Brush composition, and method of producing structure containing pha...
- Patent number 9,776,208
- Issue date Oct 3, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito Yahagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist composition and method of forming resist pattern
- Patent number 8,883,396
- Issue date Nov 11, 2014
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito Yahagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positive resist composition and method of forming resist pattern
- Patent number 8,586,281
- Issue date Nov 19, 2013
- Tokyo Ohka Kogyo Co., Ltd.
- Jun Iwashita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20220179314
- Publication date Jun 9, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Rin ODASHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20220179306
- Publication date Jun 9, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Rin ODASHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20220179313
- Publication date Jun 9, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito YAHAGI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20220121116
- Publication date Apr 21, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Koshi ONISHI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20220121118
- Publication date Apr 21, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito YAHAGI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20220107565
- Publication date Apr 7, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Masaru TAKESHITA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20210149303
- Publication date May 20, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro KOJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20210149302
- Publication date May 20, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito YAHAGI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20210132495
- Publication date May 6, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito Yahagi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20200183275
- Publication date Jun 11, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro KOJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20200174369
- Publication date Jun 4, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Yasuhiro YOSHII
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20200159118
- Publication date May 21, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Tatsuya FUJII
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20200150531
- Publication date May 14, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Yoichi HORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20200142303
- Publication date May 7, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito YAHAGI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20190204738
- Publication date Jul 4, 2019
- Tokyo Ohka Kogyo Co., Ltd.
- Hitoshi YAMANO
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20190196330
- Publication date Jun 27, 2019
- Tokyo Ohka Kogyo Co., Ltd.
- Yoichi HORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, AND POLYMER C...
- Publication number 20190018319
- Publication date Jan 17, 2019
- Tokyo Ohka Kogyo Co., Ltd.
- Hiroto YAMAZAKI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20180210338
- Publication date Jul 26, 2018
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito YAHAGI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN
- Publication number 20170371241
- Publication date Dec 28, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito YAHAGI
- C07 - ORGANIC CHEMISTRY
Information Patent Application
RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN
- Publication number 20170369697
- Publication date Dec 28, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito YAHAGI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, COMPOUND, AN...
- Publication number 20170369698
- Publication date Dec 28, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Issei SUZUKI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST PATTERN FORMING METHOD AND DEVELOPER FOR LITHOGRAPHY
- Publication number 20170059994
- Publication date Mar 2, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Kazufumi SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE...
- Publication number 20160280906
- Publication date Sep 29, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Tsuyoshi KUROSAWA
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20160209745
- Publication date Jul 21, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Taku HIRAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BRUSH COMPOSITION AND METHOD OF PRODUCING STRUCTURE CONTAINING PHAS...
- Publication number 20160194524
- Publication date Jul 7, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Hitoshi YAMANO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
BRUSH COMPOSITION, AND METHOD OF PRODUCING STRUCTURE CONTAINING PHA...
- Publication number 20160194751
- Publication date Jul 7, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito YAHAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, AND HIGH-MOL...
- Publication number 20140186769
- Publication date Jul 3, 2014
- Tokyo Ohka Kogyo Co., Ltd.
- Takaaki Kaiho
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20130337387
- Publication date Dec 19, 2013
- Tokyo Ohta Kogyo Co., Ltd.
- Masahito Yahagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20130137048
- Publication date May 30, 2013
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito Yahagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION FOR EUV OR EB AND METHOD OF FORMING RESIST PATTERN
- Publication number 20130095427
- Publication date Apr 18, 2013
- Tokyo Ohka Kogyo Co., Ltd.
- Masahito Yahagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Masahito Yahagi

Person

Patents Grantslast 30 patents

Resist composition and method of forming resist pattern

Resist composition and method of forming resist pattern

Resist composition and method of forming resist pattern

Resist composition and method of forming resist pattern

Resist composition and method of forming resist pattern

Resist composition and method of forming resist pattern

Resist composition and method of forming resist pattern

Resist composition and method for forming resist pattern

Resist composition and method of forming resist pattern

Resist composition, method of forming resist pattern, and polymer c...

Resist composition and method of forming resist pattern

Resist composition, method for forming resist pattern, compound, an...

Resist composition and method for forming resist pattern

Resist composition and method of forming resist pattern

Method of producing structure containing phase-separated structure...

Resist pattern forming method and developer for lithography

Method of producing structure containing phase-separated structure...

Brush composition, and method of producing structure containing pha...

Resist composition and method of forming resist pattern

Positive resist composition and method of forming resist pattern

Patents Applicationslast 30 patents

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, AND POLYMER C...

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN

RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, COMPOUND, AN...

RESIST PATTERN FORMING METHOD AND DEVELOPER FOR LITHOGRAPHY

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE...

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

BRUSH COMPOSITION AND METHOD OF PRODUCING STRUCTURE CONTAINING PHAS...

BRUSH COMPOSITION, AND METHOD OF PRODUCING STRUCTURE CONTAINING PHA...

RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, AND HIGH-MOL...

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

RESIST COMPOSITION FOR EUV OR EB AND METHOD OF FORMING RESIST PATTERN