Masaji Inoue

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Amagasaki-shi, Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 7,754,995
- Issue date Jul 13, 2010
- Tokyo Electron Limited
- Toshihisa Nozawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Vapor deposition apparatus measuring film thickness by irradiating...
- Publication number 20060185588
- Publication date Aug 24, 2006
- TOKYO ELECTRON LIMITED
- Toshihisa Nozawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20060108331
- Publication date May 25, 2006
- TOKYO ELECTRON LIMITED
- Toshihisa Nozawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...