Masaji Sakamura

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Tatebayashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
CVD apparatus and method of cleaning the CVD apparatus
- Patent number 8,277,560
- Issue date Oct 2, 2012
- National Institute of Advanced Industrial Science and Technology
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for cleaning CVD device and method of cleaning CVD device
- Patent number 8,043,438
- Issue date Oct 25, 2011
- National Institute of Advanced Industrial Science and Technology
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of semiconductor apparatus
- Patent number 6,274,489
- Issue date Aug 14, 2001
- Sanyo Electric Co., LTD
- Masahiro Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of a semiconductor eprom device
- Patent number 5,792,695
- Issue date Aug 11, 1998
- Sanyo Electric Co., Ltd.
- Masahiro Ono
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Device for cleaning cvd device and method of cleaning cvd device
- Publication number 20060207630
- Publication date Sep 21, 2006
- RESEARCH INST. OF INNOVATIVE TECH. FOR THE EARTH
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd apparatus and method for cleaning cvd apparatus
- Publication number 20060201533
- Publication date Sep 14, 2006
- RESEARCH INST. OF INNOVATIVE TECH. FOR THE EARTH
- Etsuo Wani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd apparatus having means for cleaning with fluorine gas and metho...
- Publication number 20050252451
- Publication date Nov 17, 2005
- Tatsuro Beppu
- B08 - CLEANING
Information Patent Application
Cvd apparatus and method of cleaning the cvd apparatus
- Publication number 20040255854
- Publication date Dec 23, 2004
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd apparatus and method of cleaning the cvd apparatus
- Publication number 20040250775
- Publication date Dec 16, 2004
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...