Masakatsu KASHIWAZAKI

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mounting table, substrate processing apparatus, and control method
- Patent number 11,587,820
- Issue date Feb 21, 2023
- Tokyo Electron Limited
- Masakatsu Kashiwazaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220367154
- Publication date Nov 17, 2022
- TOKYO ELECTRON LIMITED
- Masakatsu KASHIWAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210335584
- Publication date Oct 28, 2021
- Masakatsu KASHIWAZAKI
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
MOUNTING TABLE, SUBSTRATE PROCESSING APPARATUS, AND CONTROL METHOD
- Publication number 20200211892
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Masakatsu KASHIWAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180374687
- Publication date Dec 27, 2018
- TOKYO ELECTRON LIMITED
- Masakatsu KASHIWAZAKI
- H01 - BASIC ELECTRIC ELEMENTS