Masakatsu Ota

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus and device manufacturing method using...
- Patent number 6,795,167
- Issue date Sep 21, 2004
- Canon Kabushiki Kaisha
- Masakatsu Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and device manufacturing method using...
- Patent number 6,646,717
- Issue date Nov 11, 2003
- Canon Kabushiki Kaisha
- Masakatsu Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminance distribution measuring system
- Patent number 4,799,791
- Issue date Jan 24, 1989
- Canon Kabushiki Kaisha
- Hiroshi Echizen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Projection exposure apparatus and device manufacturing method using...
- Publication number 20020097758
- Publication date Jul 25, 2002
- Masakatsu Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus and device manufacturing method using...
- Publication number 20020089654
- Publication date Jul 11, 2002
- Masakatsu Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY