Masakazu HIGUMA

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate mounting stage and surface treatment method therefor
- Patent number 9,214,376
- Issue date Dec 15, 2015
- Tokyo Electron Limited
- Masakazu Higuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and structure therein
- Patent number 8,636,873
- Issue date Jan 28, 2014
- Tokyo Electron Limited
- Masakazu Higuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface processing method for mounting stage
- Patent number 8,343,372
- Issue date Jan 1, 2013
- Tokyo Electron Limited
- Tadashi Aoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface treatment method
- Patent number 7,815,492
- Issue date Oct 19, 2010
- Tokyo Electron Limited
- Yasuharu Sasaki
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
TABLE FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS
- Publication number 20110192540
- Publication date Aug 11, 2011
- TOKYO ELECTRON LIMITED
- Masakazu Higuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING STAGE AND PLASMA PROCESSING APPARATUS
- Publication number 20090199967
- Publication date Aug 13, 2009
- TOKYO ELECTRON LIMITED
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Table for plasma processing apparatus and plasma processing apparatus
- Publication number 20090101284
- Publication date Apr 23, 2009
- TOKYO ELECTRON LIMITED
- Masakazu Higuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT METHOD
- Publication number 20080280536
- Publication date Nov 13, 2008
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE PROCESSING METHOD FOR MOUNTING STAGE
- Publication number 20080237030
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Tadashi Aoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND STRUCTURE THEREIN
- Publication number 20080230181
- Publication date Sep 25, 2008
- TOKYO ELECTRON LIMITED
- Masakazu HIGUMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING STAGE AND SURFACE TREATMENT METHOD THEREFOR
- Publication number 20080217291
- Publication date Sep 11, 2008
- TOKYO ELECTRON LIMITED
- Masakazu HIGUMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing apparatus
- Publication number 20050042881
- Publication date Feb 24, 2005
- TOKYO ELECTRON LIMITED
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS

Masakazu HIGUMA

Person

Patents Grantslast 30 patents

Substrate mounting stage and surface treatment method therefor

Plasma processing apparatus and structure therein

Surface processing method for mounting stage

Surface treatment method

Patents Applicationslast 30 patents

TABLE FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS

MOUNTING STAGE AND PLASMA PROCESSING APPARATUS

Table for plasma processing apparatus and plasma processing apparatus

SURFACE TREATMENT METHOD

SURFACE PROCESSING METHOD FOR MOUNTING STAGE

PLASMA PROCESSING APPARATUS AND STRUCTURE THEREIN

SUBSTRATE MOUNTING STAGE AND SURFACE TREATMENT METHOD THEREFOR

Processing apparatus