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Masakazu Kanezawa
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Shiroi, JP
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last 30 patents
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Patent Grant
Defect inspection method and device therefor
Patent number
9,148,631
Issue date
Sep 29, 2015
Hitachi High-Technologies Corporation
Makoto Ono
H04 - ELECTRIC COMMUNICATION TECHNIQUE
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DEFECT INSPECTION METHOD AND DEVICE THEREFOR
Publication number
20130235182
Publication date
Sep 12, 2013
Makoto Ono
G01 - MEASURING TESTING