Membership
Tour
Register
Log in
Masakazu MINAMI
Follow
Person
Kyoto, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Absorbance analysis apparatus for DCR gas, absorbance analysis meth...
Patent number
11,796,460
Issue date
Oct 24, 2023
Tokyo Electron Limited
Yuichi Furuya
G01 - MEASURING TESTING
Information
Patent Grant
Concentration control apparatus, source consumption quantity estima...
Patent number
11,631,596
Issue date
Apr 18, 2023
Horiba Stec, Co., Ltd.
Toru Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vaporization device, film formation device, program for a concentra...
Patent number
11,519,070
Issue date
Dec 6, 2022
Horiba Stec, Co., Ltd.
Toru Shimizu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Light absorbance analysis apparatus and program record medium for r...
Patent number
11,493,443
Issue date
Nov 8, 2022
Horiba Stec, Co., Ltd.
Toru Shimizu
G01 - MEASURING TESTING
Information
Patent Grant
Concentration control apparatus, zero point adjustment method, and...
Patent number
11,365,480
Issue date
Jun 21, 2022
Horiba Stec, Co., Ltd.
Toru Shimizu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Absorption spectroscopic system, program recording medium for an ab...
Patent number
11,226,235
Issue date
Jan 18, 2022
Horiba Stec, Co., Ltd.
Toru Shimizu
G01 - MEASURING TESTING
Information
Patent Grant
Gas control system and film formation apparatus provided with gas c...
Patent number
10,927,462
Issue date
Feb 23, 2021
Horiba Stec, Co., Ltd.
Hiroshi Nishizato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Concentration control apparatus and material gas supply system
Patent number
10,718,050
Issue date
Jul 21, 2020
Horiba Stec, Co., Ltd.
Toru Shimizu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas control system, deposition apparatus including gas control syst...
Patent number
10,655,220
Issue date
May 19, 2020
HORIBA STEC, Co., Ltd.
Yuhei Sakaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas control system and program for gas control system
Patent number
10,138,555
Issue date
Nov 27, 2018
Horiba Stec, Co., Ltd.
Hiroshi Nishizato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Decomposition detecting unit, concentration measuring unit, and con...
Patent number
9,970,865
Issue date
May 15, 2018
HORIBA STEC, Co., Ltd.
Masakazu Minami
G05 - CONTROLLING REGULATING
Information
Patent Grant
Cp2Mg concentration measuring device
Patent number
9,823,181
Issue date
Nov 21, 2017
Horiba Stec, Co., Ltd.
Daisuke Hayashi
G01 - MEASURING TESTING
Information
Patent Grant
Source gas concentration control system
Patent number
8,459,291
Issue date
Jun 11, 2013
HORIBA, Ltd.
Masakazu Minami
G05 - CONTROLLING REGULATING
Information
Patent Grant
Film formation apparatus and method of using the same
Patent number
7,604,010
Issue date
Oct 20, 2009
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
GAS ANALYSIS DEVICE, FLUID CONTROL SYSTEM, GAS ANALYSIS PROGRAM, AN...
Publication number
20240094176
Publication date
Mar 21, 2024
Horiba Stec, Co., Ltd.
Motonobu TAKAHASHI
G01 - MEASURING TESTING
Information
Patent Application
ANALYSIS DEVICE, ANALYSIS METHOD, AND ANALYSIS PROGRAM
Publication number
20240030013
Publication date
Jan 25, 2024
Horiba Stec, Co., Ltd.
Miyako HADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS ANALYSIS DEVICE AND GAS ANALYSIS METHOD
Publication number
20230417660
Publication date
Dec 28, 2023
Horiba Stec, Co., Ltd.
Yuhei SAKAGUCHI
G01 - MEASURING TESTING
Information
Patent Application
GAS ANALYSIS APPARATUS AND GAS ANALYSIS METHOD
Publication number
20230228677
Publication date
Jul 20, 2023
Horiba Stec, Co., Ltd.
Motonobu TAKAHASHI
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL MEASUREMENT CELL, OPTICAL ANALYZER, WINDOW FORMING MEMBER,...
Publication number
20230228679
Publication date
Jul 20, 2023
Horiba Stec, Co., Ltd.
Yoshiaki NAKATA
G01 - MEASURING TESTING
Information
Patent Application
Absorbance analysis apparatus for DCR gas, absorbance analysis meth...
Publication number
20220307977
Publication date
Sep 29, 2022
TOKYO ELECTRON LIMITED
Yuichi FURUYA
G01 - MEASURING TESTING
Information
Patent Application
ABSORPTION SPECTROSCOPIC SYSTEM, PROGRAM RECORDING MEDIUM FOR AN AB...
Publication number
20200355551
Publication date
Nov 12, 2020
Horiba Stec, Co., Ltd.
Toru SHIMIZU
G01 - MEASURING TESTING
Information
Patent Application
LIGHT ABSORBANCE ANALYSIS APPARATUS AND PROGRAM RECORD MEDIUM FOR R...
Publication number
20200340918
Publication date
Oct 29, 2020
Horiba Stec, Co., Ltd.
Toru SHIMIZU
G01 - MEASURING TESTING
Information
Patent Application
CONCENTRATION CONTROL APPARATUS, SOURCE CONSUMPTION QUANTITY ESTIMA...
Publication number
20200294820
Publication date
Sep 17, 2020
Horiba Stec, Co., Ltd.
Toru SHIMIZU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPORIZATION DEVICE, FILM FORMATION DEVICE, PROGRAM FOR A CONCENTRA...
Publication number
20200255944
Publication date
Aug 13, 2020
Horiba Stec, Co., Ltd.
Toru SHIMIZU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONCENTRATION CONTROL APPARATUS, ZERO POINT ADJUSTMENT METHOD, AND...
Publication number
20200240015
Publication date
Jul 30, 2020
Horiba Stec, Co., Ltd.
Toru SHIMIZU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROGRAM FOR SUBSTRATE PROCESSING...
Publication number
20190333737
Publication date
Oct 31, 2019
Horiba Stec, Co., Ltd.
Daisuke HAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ABSORBANCE METER AND SEMICONDUCTOR MANUFACTURING DEVICE USING ABSOR...
Publication number
20190242818
Publication date
Aug 8, 2019
Horiba Stec, Co., Ltd.
Hiroshi NISHIZATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS CONTROL SYSTEM AND FILM FORMATION APPARATUS PROVIDED WITH GAS C...
Publication number
20190161863
Publication date
May 30, 2019
Horiba Stec, Co., Ltd.
Hiroshi NISHIZATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONCENTRATION CONTROL APPARATUS AND MATERIAL GAS SUPPLY SYSTEM
Publication number
20190085444
Publication date
Mar 21, 2019
Horiba Stec, Co., Ltd.
Toru SHIMIZU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS CONTROL SYSTEM, DEPOSITION APPARATUS INCLUDING GAS CONTROL SYST...
Publication number
20180258530
Publication date
Sep 13, 2018
HORIBA STEC, CO., LTD.
Yuhei Sakaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RADIATION THERMOMETER, RADIATION TEMPERATURE MEASUREMENT SYSTEM, ST...
Publication number
20170138794
Publication date
May 18, 2017
HORIBA, Ltd.
Sho FUJINO
G01 - MEASURING TESTING
Information
Patent Application
GAS CONTROL SYSTEM AND PROGRAM FOR GAS CONTROL SYSTEM
Publication number
20170101715
Publication date
Apr 13, 2017
Horiba Stec, Co., Ltd.
Hiroshi NISHIZATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CP2Mg CONCENTRATION MEASURING DEVICE
Publication number
20170052115
Publication date
Feb 23, 2017
Horiba Stec, Co., Ltd.
Daisuke HAYASHI
G01 - MEASURING TESTING
Information
Patent Application
DECOMPOSITION DETECTING UNIT, CONCENTRATION MEASURING UNIT, AND CON...
Publication number
20160153898
Publication date
Jun 2, 2016
HORIBA STEC, CO., LTD.
Masakazu Minami
G01 - MEASURING TESTING
Information
Patent Application
SOURCE GAS CONCENTRATION CONTROL SYSTEM
Publication number
20110155264
Publication date
Jun 30, 2011
Horiba, Ltd.
Masakazu Minami
G05 - CONTROLLING REGULATING
Information
Patent Application
Film formation apparatus and method of using the same
Publication number
20060042544
Publication date
Mar 2, 2006
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...