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Masakazu Odaka
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Akita, JP
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last 30 patents
Information
Patent Grant
Liquid crystal device and method for manufacturing same with spacer...
Patent number
6,853,431
Issue date
Feb 8, 2005
Semiconductor Energy Laboratory Co., Ltd.
Masahiko Sato
G02 - OPTICS
Information
Patent Grant
CVD apparatus
Patent number
6,520,189
Issue date
Feb 18, 2003
Semiconductor Energy Laboratory Co., Ltd.
Takashi Inushima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Liquid crystal device and method for manufacturing same with spacer...
Patent number
6,493,057
Issue date
Dec 10, 2002
Semiconductor Energy Laboratory Co., Ltd.
Masahiko Sato
G02 - OPTICS
Information
Patent Grant
CVD apparatus
Patent number
6,013,338
Issue date
Jan 11, 2000
Semiconductor Energy Laboratory Co., Ltd.
Takashi Inushima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a film on a substrate
Patent number
5,855,970
Issue date
Jan 5, 1999
Semiconductor Energy Laboratory Co., Ltd.
Takashi Inushima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming a multi-layer planarization structure
Patent number
5,629,245
Issue date
May 13, 1997
Semiconductor Energy Laboratory Co., Ltd.
Takashi Inushima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
CVD apparatus
Patent number
5,427,824
Issue date
Jun 27, 1995
Semiconductor Energy Laboratory Co., Ltd.
Takashi Inushima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
CVD apparatus
Publication number
20030140941
Publication date
Jul 31, 2003
Semiconductor Energy Laboratory Co., Ltd.
Takashi Inushima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Liquid crystal device and method for manufacturing same with spacer...
Publication number
20030071957
Publication date
Apr 17, 2003
Semiconductor Energy Laboratory Co., Ltd.
Masahiko Sato
G02 - OPTICS