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Masakazu Sakata
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Toyama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus, exhaust system and method of manufa...
Patent number
10,163,663
Issue date
Dec 25, 2018
Kokusai Electric Corporation
Toshihiko Yonejima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate supporting table, substrate processing apparatus, and man...
Patent number
9,786,528
Issue date
Oct 10, 2017
Hitachi Kokusai Electric Inc.
Masakazu Sakata
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
9,378,991
Issue date
Jun 28, 2016
Hitachi Kokusai Electric Inc.
Akira Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate supporter and method of m...
Patent number
9,076,644
Issue date
Jul 7, 2015
Hitachi Kokusai Electric Inc.
Masakazu Sakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
8,444,363
Issue date
May 21, 2013
Hitachi Kokusai Electric Inc.
Masakazu Sakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,923,380
Issue date
Apr 12, 2011
Hitachi Kokusai Electric Inc.
Hidehiro Yanai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CONVERSION PIPE ARRANGEMENT, SUBSTRATE PROCESSING APPARATUS, METHOD...
Publication number
20240093813
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Takuto SHOJI
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING...
Publication number
20230095537
Publication date
Mar 30, 2023
Kokusai Electric Corporation
Ryosuke TAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COOLING METHOD, A METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AN...
Publication number
20220310420
Publication date
Sep 29, 2022
Kokusai Electric Corporation
Hironori SHIMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS AND EXHAUST SYSTEM
Publication number
20200392620
Publication date
Dec 17, 2020
Kokusai Electric Corporation
Masanori OKUNO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, EXHAUST SYSTEM AND METHOD OF MANUFA...
Publication number
20180144953
Publication date
May 24, 2018
Hitachi Kokusai Electric Inc.
Toshihiko YONEJIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORTER AND METHOD OF M...
Publication number
20140004710
Publication date
Jan 2, 2014
Hitachi Kokusai Electric Inc.
Masakazu Sakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Placement Stage, Substrate Processing Apparatus and Metho...
Publication number
20120329290
Publication date
Dec 27, 2012
Hitachi Kokusai Electric Inc.
Toshiya Shimada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORTING TABLE, SUBSTRATE PROCESSING APPARATUS, AND MAN...
Publication number
20120222818
Publication date
Sep 6, 2012
Hitachi Kokusai Electric Inc.
Masakazu SAKATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20100150687
Publication date
Jun 17, 2010
Hitachi Kokusai Electric, Inc.
Masakazu SAKATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20100068895
Publication date
Mar 18, 2010
Hitachi Kokusai Electric Inc.
Hidehiro Yanai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20100068414
Publication date
Mar 18, 2010
Hitachi Kokusai Electric Inc.
Akira Takahashi
H01 - BASIC ELECTRIC ELEMENTS