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Masakazu Shimada
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Tokyo, JP
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last 30 patents
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Patent Grant
Semiconductor fabricating apparatus, method for controlling oxygen...
Patent number
5,879,415
Issue date
Mar 9, 1999
Kokusai Electric Co., Ltd.
Masakazu Shimada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor fabricating apparatus, method for controlling oxygen...
Patent number
5,735,961
Issue date
Apr 7, 1998
Kokusai Electric Co., Ltd.
Masakazu Shimada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for supplying and discharging gas to and from semiconductor...
Patent number
5,277,215
Issue date
Jan 11, 1994
Kokusai Electric Co., Ltd.
Hidehiro Yanagawa
C30 - CRYSTAL GROWTH