Masakazu Shimada

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate holder and mounting tool
- Patent number 11,031,270
- Issue date Jun 8, 2021
- Kokusai Electric Corporation
- Atsushi Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, liquid precursor replenishment syst...
- Patent number 10,876,207
- Issue date Dec 29, 2020
- Kokusai Electric Corporation
- Noriyuki Isobe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,437,421
- Issue date Sep 6, 2016
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating apparatus, substrate processing apparatus employing the sam...
- Patent number 9,184,069
- Issue date Nov 10, 2015
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,876,453
- Issue date Nov 4, 2014
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and film forming method
- Patent number 8,507,296
- Issue date Aug 13, 2013
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,501,599
- Issue date Aug 6, 2013
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 8,303,712
- Issue date Nov 6, 2012
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating apparatus, substrate processing apparatus employing the sam...
- Patent number 8,158,911
- Issue date Apr 17, 2012
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus, coolant gas supply nozzle and semic...
- Patent number 8,148,271
- Issue date Apr 3, 2012
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating apparatus, substrate processing apparatus, and method of ma...
- Patent number 8,116,618
- Issue date Feb 14, 2012
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing equipment
- Patent number D652395
- Issue date Jan 17, 2012
- Hitachi Kokusai Electric Inc.
- Masakazu Shimada
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Semiconductor manufacturing equipment
- Patent number D651990
- Issue date Jan 10, 2012
- Hitachi Kokusai Electric Inc.
- Masakazu Shimada
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, heating device, and semiconductor d...
- Patent number 8,030,599
- Issue date Oct 4, 2011
- Hitachi Kokusai Electric, Inc.
- Masakazu Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, heating apparatus for use in the sa...
- Patent number 7,863,204
- Issue date Jan 4, 2011
- Hitachi Kokusai Electric Inc.
- Toshimitsu Miyata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus having gas side flow via gas inlet
- Patent number 7,700,054
- Issue date Apr 20, 2010
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20220186368
- Publication date Jun 16, 2022
- Hitachi Kokusai Electric Inc.
- Atsushi MORIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, LIQUID PRECURSOR REPLENISHMENT SYST...
- Publication number 20190211449
- Publication date Jul 11, 2019
- Hitachi Kokusai Electric Inc.
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER AND MOUNTING TOOL
- Publication number 20180374734
- Publication date Dec 27, 2018
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20180135176
- Publication date May 17, 2018
- Hitachi Kokusai Electric Inc.
- Atsushi MORIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20140213069
- Publication date Jul 31, 2014
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20110170989
- Publication date Jul 14, 2011
- Hitachi Kokusai Electric Inc.
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100229416
- Publication date Sep 16, 2010
- Hitachi Kokusai Electric Inc.
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, HEATING DEVICE, AND SEMICONDUCTOR D...
- Publication number 20100032425
- Publication date Feb 11, 2010
- Hitachi Kokusai Electric, Inc.
- Masakazu Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Coolant Gas Supply Nozzle and Semic...
- Publication number 20090291566
- Publication date Nov 26, 2009
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method and film forming method
- Publication number 20090197352
- Publication date Aug 6, 2009
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20090197402
- Publication date Aug 6, 2009
- Hitachi Kokusai Electric, Inc.
- Seiyo NAKASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus, heating apparatus for use in the sa...
- Publication number 20090035948
- Publication date Feb 5, 2009
- Hitachi Kokusai Electric Inc.
- Toshimitsu Miyata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Substrate Processing Method
- Publication number 20090029486
- Publication date Jan 29, 2009
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heating apparatus, substrate processing apparatus employing the sam...
- Publication number 20090014428
- Publication date Jan 15, 2009
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heating apparatus, substrate processing apparatus employing the sam...
- Publication number 20090014435
- Publication date Jan 15, 2009
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating apparatus, substrate processing apparatus, and method of ma...
- Publication number 20090016706
- Publication date Jan 15, 2009
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, method of manufacturing semiconduct...
- Publication number 20080153314
- Publication date Jun 26, 2008
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Board processing apparatus and method of fabricating semiconductor...
- Publication number 20080087218
- Publication date Apr 17, 2008
- Hitachi Kokusai Electric Inc.
- Masakazu SHIMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Masakazu Shimada

Person

Patents Grantslast 30 patents

Substrate processing apparatus, substrate holder and mounting tool

Substrate processing apparatus, liquid precursor replenishment syst...

Substrate processing apparatus, method of manufacturing semiconduct...

Heating apparatus, substrate processing apparatus employing the sam...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing method and film forming method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, method for manufacturing semiconduc...

Heating apparatus, substrate processing apparatus employing the sam...

Substrate processing apparatus, coolant gas supply nozzle and semic...

Heating apparatus, substrate processing apparatus, and method of ma...

Semiconductor manufacturing equipment

Semiconductor manufacturing equipment

Substrate processing apparatus, heating device, and semiconductor d...

Substrate processing apparatus, heating apparatus for use in the sa...

Substrate processing apparatus having gas side flow via gas inlet

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING APPARATUS, LIQUID PRECURSOR REPLENISHMENT SYST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER AND MOUNTING TOOL

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, HEATING DEVICE, AND SEMICONDUCTOR D...

Substrate Processing Apparatus, Coolant Gas Supply Nozzle and Semic...

Substrate processing method and film forming method

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

Substrate processing apparatus, heating apparatus for use in the sa...

Substrate Processing Apparatus and Substrate Processing Method

Heating apparatus, substrate processing apparatus employing the sam...

Heating apparatus, substrate processing apparatus employing the sam...

Heating apparatus, substrate processing apparatus, and method of ma...

Substrate processing apparatus, method of manufacturing semiconduct...

Board processing apparatus and method of fabricating semiconductor...