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Masakazu Tokita
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Fuji, JP
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last 30 patents
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Patent Grant
Optical pattern inspection system
Patent number
5,185,812
Issue date
Feb 9, 1993
Kabushiki Kaisha Toshiba
Kyoji Yamashita
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Method of checking pattern and apparatus therefor
Patent number
4,958,374
Issue date
Sep 18, 1990
Toshiba Machine Company, Ltd.
Masakazu Tokita
G06 - COMPUTING CALCULATING COUNTING