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Masakazu Yamada
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Kawasaki-shi, JP
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last 30 patents
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Patent Grant
Positive resist composition and method of forming resist pattern
Patent number
7,972,762
Issue date
Jul 5, 2011
Tokyo Ohka Kogyo Co., Ltd.
Masaaki Muroi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Method of producing positive resist composition, positive resist co...
Patent number
7,879,527
Issue date
Feb 1, 2011
Tokyo Ohka Kogyo Co., Ltd.
Masaaki Muroi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Copolymer for semiconductor lithography and process for production...
Patent number
7,695,889
Issue date
Apr 13, 2010
Maruzen Petrochemical Co., LTD
Takanori Yamagishi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
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Patent Application
POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20090233220
Publication date
Sep 17, 2009
Masaaki Muroi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
METHOD OF PRODUCING POSITIVE RESIST COMPOSITION, POSITIVE RESIST CO...
Publication number
20090092924
Publication date
Apr 9, 2009
Tokyo Ohka Kogyo Co., Ltd.
Masaaki Muroi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Copolymer for semiconductor lithography and process for production...
Publication number
20060257784
Publication date
Nov 16, 2006
Takanori Yamagishi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...