Masakazu Yarimitsu

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus
- Patent number 10,665,478
- Issue date May 26, 2020
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220080551
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Nobutaka FUKUNAGA
- B24 - GRINDING POLISHING
Information Patent Application
PROCESSING APPARATUS, PROCESSING METHOD AND COMPUTER- READABLE RECO...
- Publication number 20210362290
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Tomohiro KANEKO
- B24 - GRINDING POLISHING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20170278727
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING