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PLASMA PROCESSING APPARATUS
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Publication number 20240087849
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Publication date Mar 14, 2024
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TOKYO ELECTRON LIMITED
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Masaki HIRAYAMA
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H01 - BASIC ELECTRIC ELEMENTS
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PLASMA PROCESSING APPARATUS
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Publication number 20240071730
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Publication date Feb 29, 2024
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TOKYO ELECTRON LIMITED
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Masaki HIRAYAMA
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H01 - BASIC ELECTRIC ELEMENTS
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ELECTROSTATIC CHUCK
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Publication number 20230290620
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Publication date Sep 14, 2023
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Sumitomo Osaka Cement Co., Ltd.
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Masaki HIRAYAMA
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H01 - BASIC ELECTRIC ELEMENTS
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WAFER SUPPORT DEVICE
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Publication number 20230223244
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Publication date Jul 13, 2023
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Sumitomo Osaka Cement Co., Ltd.
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Masaki HIRAYAMA
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H01 - BASIC ELECTRIC ELEMENTS
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ELECTROSTATIC CHUCK DEVICE
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Publication number 20230215704
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Publication date Jul 6, 2023
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Sumitomo Osaka Cement Co., Ltd.
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Masaki HIRAYAMA
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H01 - BASIC ELECTRIC ELEMENTS
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PLASMA PROCESSING APPARATUS
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Publication number 20230019369
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Publication date Jan 19, 2023
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TOKYO ELECTRON LIMITED
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Masaki HIRAYAMA
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H01 - BASIC ELECTRIC ELEMENTS
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PLASMA PROCESSING APPARATUS
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Publication number 20230010178
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Publication date Jan 12, 2023
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TOKYO ELECTRON LIMITED
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Masaki HIRAYAMA
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma Treatment Device
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Publication number 20190295828
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Publication date Sep 26, 2019
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TOKYO ELECTRON LIMITED
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Masaki Hirayama
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H01 - BASIC ELECTRIC ELEMENTS
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PLASMA PROCESSING APPARATUS
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Publication number 20130112352
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Publication date May 9, 2013
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TOHOKU UNIVERSITY
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Masaki Hirayama
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B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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PLASMA PROCESSING APPARATUS
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Publication number 20110303364
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Publication date Dec 15, 2011
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TOKYO ELECTRON LIMITED
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Masaki Hirayama
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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PLASMA PROCESSING APPARATUS
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Publication number 20110303363
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Publication date Dec 15, 2011
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TOKYO ELECTRON LIMITED
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Masaki Hirayama
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H01 - BASIC ELECTRIC ELEMENTS
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PLASMA PROCESSING APPARATUS
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Publication number 20110259523
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Publication date Oct 27, 2011
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Tokyo Electron Limited
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Masaki Hirayama
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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PLASMA PROCESSING APPARATUS
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Publication number 20110146910
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Publication date Jun 23, 2011
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TOKYO ELECTRON LIMITED
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Masaki Hirayama
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR