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Masaki Hosoda
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Saitama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electron beam writing system and electron beam writing method
Patent number
7,423,274
Issue date
Sep 9, 2008
Hitachi High-Technologies Corporation
Yoshinori Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for applying charged particle beam
Patent number
7,378,668
Issue date
May 27, 2008
Hitachi High-Technologies Corporation
Sayaka Tanimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mechanism for sealing
Patent number
7,341,393
Issue date
Mar 11, 2008
Canon Kabushiki Kaisha
Masaki Hosoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam exposure apparatus, charged particle beam exp...
Patent number
7,173,262
Issue date
Feb 6, 2007
Canon Kabushiki Kaisha
Masaki Hosoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of charged particle beam lithography and equipment for charg...
Patent number
7,105,842
Issue date
Sep 12, 2006
Hitachi High-Technologies Corporation
Sayaka Tanimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure apparatus
Patent number
6,870,171
Issue date
Mar 22, 2005
Canon Kabushiki Kaisha
Masaki Hosoda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method and apparatus for applying charged particle beam
Publication number
20060289781
Publication date
Dec 28, 2006
Sayaka Tanimoto
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron beam writing system and electron beam writing method
Publication number
20060197453
Publication date
Sep 7, 2006
Hitachi High-Technologies Corporation
Yoshinori Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Application
Charged particle beam exposure apparatus, charged particle beam exp...
Publication number
20060017019
Publication date
Jan 26, 2006
Canon Kabushiki Kaisha
Masaki Hosoda
B82 - NANO-TECHNOLOGY
Information
Patent Application
Mechanism for sealing
Publication number
20060006342
Publication date
Jan 12, 2006
Canon Kabushiki Kaisha
Masaki Hosoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of charged particle beam lithography and equipment for charg...
Publication number
20050072941
Publication date
Apr 7, 2005
Hitachi High-Technologies, Ltd.
Sayaka Tanimoto
B82 - NANO-TECHNOLOGY
Information
Patent Application
Exposure apparatus
Publication number
20040188636
Publication date
Sep 30, 2004
Canon Kabushiki Kaisha
Masaki Hosoda
B82 - NANO-TECHNOLOGY