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Masaki KITSUNEZUKA
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Sapporo City, JP
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last 30 patents
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Patent Application
AUTONOMOUS OPERATION OF PLASMA PROCESSING TOOL
Publication number
20230352282
Publication date
Nov 2, 2023
TOKYO ELECTRON LIMITED
Jun SHINAGAWA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
DATA FUSION OF MULTIPLE SENSORS
Publication number
20230317483
Publication date
Oct 5, 2023
TOKYO ELECTRON LIMITED
Masaki KITSUNEZUKA
G05 - CONTROLLING REGULATING