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Masaki Koizumi
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
TiN-based film and TiN-based film forming method
Patent number
10,927,453
Issue date
Feb 23, 2021
Tokyo Electron Limited
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave heat treatment apparatus and microwave heat treatment method
Patent number
10,529,598
Issue date
Jan 7, 2020
Tokyo Electron Limited
Seokhyoung Hong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming TiON film
Patent number
10,483,100
Issue date
Nov 19, 2019
Tokyo Electron Limited
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lower electrode of DRAM capacitor and manufacturing method thereof
Patent number
10,199,451
Issue date
Feb 5, 2019
Tokyo Electron Limited
Tadahiro Ishizaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film formation method, cleaning method and film formation apparatus
Patent number
8,021,717
Issue date
Sep 20, 2011
Tokyo Electron Limited
Seishi Murakami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
TiN-BASED FILM AND TiN-BASED FILM FORMING METHOD
Publication number
20180135169
Publication date
May 17, 2018
Tadahiro ISHIZAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOWER ELECTRODE OF DRAM CAPACITOR AND MANUFACTURING METHOD THEREOF
Publication number
20170179219
Publication date
Jun 22, 2017
Tadahiro ISHIZAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING TiON FILM
Publication number
20170092489
Publication date
Mar 30, 2017
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATCHING METHOD AND MICROWAVE HEATING METHOD
Publication number
20150144621
Publication date
May 28, 2015
TOKYO ELECTRON LIMITED
Seokhyoung HONG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MICROWAVE HEAT TREATMENT APPARATUS AND MICROWAVE HEAT TREATMENT METHOD
Publication number
20150144622
Publication date
May 28, 2015
TOKYO ELECTRON LIMITED
Seokhyoung HONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMATION METHOD, CLEANING METHOD AND FILM FORMATION APPARATUS
Publication number
20090142513
Publication date
Jun 4, 2009
TOKYO ELECTRON LIMITED
Seishi MURAKAMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...