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Masaki Mizuochi
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Ventilated semiconductor processing apparatus
Patent number
12,014,897
Issue date
Jun 18, 2024
HITACHI HIGH-TECH CORPORATION
Akira Nishioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for evaluating semiconductor substrate
Patent number
D989831
Issue date
Jun 20, 2023
HITACHI HIGH-TECH CORPORATION
Masayuki Arakawa
D15 - Machines not elsewhere specified
Information
Patent Grant
Semiconductor substrate transfer apparatus
Patent number
D989830
Issue date
Jun 20, 2023
HITACHI HIGH-TECH CORPORATION
Masayuki Arakawa
D15 - Machines not elsewhere specified
Information
Patent Grant
Apparatus for evaluating semiconductor substrate
Patent number
D989144
Issue date
Jun 13, 2023
HITACHI HIGH-TECH CORPORATION
Masayuki Arakawa
D15 - Machines not elsewhere specified
Information
Patent Grant
Linear motor for vacuum and vacuum processing apparatus
Patent number
11,418,101
Issue date
Aug 16, 2022
Hitachi High-Technologies Corporation
Tomotaka Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,380,515
Issue date
Jul 5, 2022
HITACHI HIGH-TECH CORPORATION
Keiichiro Hosobuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus, sample alignment method of charged...
Patent number
11,342,156
Issue date
May 24, 2022
HITACHI HIGH-TECH CORPORATION
Hironori Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage apparatus and charged particle beam apparatus
Patent number
11,049,687
Issue date
Jun 29, 2021
HITACHI HIGH-TECH CORPORATION
Motohiro Takahashi
G01 - MEASURING TESTING
Information
Patent Grant
Stage apparatus, and charged particle beam apparatus
Patent number
10,879,033
Issue date
Dec 29, 2020
HITACHI HIGH-TECH CORPORATION
Akira Nishioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle radiation device
Patent number
10,840,059
Issue date
Nov 17, 2020
HITACHI HIGH-TECH CORPORATION
Kentaro Shigeoka
G05 - CONTROLLING REGULATING
Information
Patent Grant
Charged particle beam apparatus comprising a controller to set cont...
Patent number
10,804,067
Issue date
Oct 13, 2020
HITACHI HIGH-TECH CORPORATION
Takanori Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage device and charged particle beam device
Patent number
10,770,259
Issue date
Sep 8, 2020
HITACHI HIGH-TECH CORPORATION
Motohiro Takahashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Stage device and charged particle beam device
Patent number
10,658,151
Issue date
May 19, 2020
HITACHI HIGH-TECH CORPORATION
Motohiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage device and charged particle beam device
Patent number
10,600,614
Issue date
Mar 24, 2020
Hitachi High-Technologies Corporation
Motohiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage apparatus and charged particle beam apparatus
Patent number
10,366,912
Issue date
Jul 30, 2019
Hitachi High-Technologies Corporation
Motohiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage apparatus with braking system for lens, beam, or vibration co...
Patent number
9,905,393
Issue date
Feb 27, 2018
Hitachi High-Technologies Corporation
Hironori Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage device and charged particle beam device using the same
Patent number
9,887,064
Issue date
Feb 6, 2018
Hitachi High-Technologies Corporation
Akira Nishioka
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Charged particle radiation apparatus
Patent number
9,734,983
Issue date
Aug 15, 2017
Hitachi High-Technologies Corporation
Daisuke Mutou
G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information
Patent Grant
Stage device and charged particle beam apparatus using the stage de...
Patent number
9,627,173
Issue date
Apr 18, 2017
Hitachi High-Technologies Corporation
Hironori Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus, stage controlling method, and stag...
Patent number
9,502,208
Issue date
Nov 22, 2016
Hitachi High-Technologies Corporation
Masaki Mizuochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage apparatus, and charged particle beam apparatus using same
Patent number
9,368,320
Issue date
Jun 14, 2016
Hitachi High-Technologies Corporation
Akira Nishioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Linear motor, movable stage and electron microscope
Patent number
9,093,890
Issue date
Jul 28, 2015
Hitachi High-Technologies Corporation
Hideki Tanaka
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Sample positioning apparatus, sample stage, and charged particle be...
Patent number
8,946,652
Issue date
Feb 3, 2015
Hitachi High-Technologies Corporation
Motohiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
8,880,374
Issue date
Nov 4, 2014
Hitachi High-Technologies Corporation
Masaki Mizuochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam application apparatus
Patent number
8,158,955
Issue date
Apr 17, 2012
Hitachi High-Technologies Corporation
Masaki Mizuochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam application apparatus
Patent number
7,763,863
Issue date
Jul 27, 2010
Hitachi High-Technologies Corporation
Masaki Mizuochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam drawing apparatus
Patent number
6,794,665
Issue date
Sep 21, 2004
Hitachi High-Technologies Corporation
Masaki Kurihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Evacuation use sample chamber and circuit pattern forming apparatus...
Patent number
6,744,054
Issue date
Jun 1, 2004
Hitachi, Ltd.
Masaki Mizuochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Travelling worktable apparatus
Patent number
6,659,441
Issue date
Dec 9, 2003
Hitachi, Ltd.
Masaki Mizuochi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Travelling worktable apparatus
Patent number
6,446,950
Issue date
Sep 10, 2002
Hitachi, Ltd.
Masaki Mizuochi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
STAGE DEVICE
Publication number
20240363305
Publication date
Oct 31, 2024
HITACHI HIGH-TECH CORPORATION
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Stage Device, Charged Particle Beam Device, and Vacuum Device
Publication number
20240258063
Publication date
Aug 1, 2024
Hitachi High-Tech Corporation
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20240177963
Publication date
May 30, 2024
HITACHI HIGH-TECH CORPORATION
Yuki UCHIOKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE, CHARGED PARTICLE BEAM DEVICE, AND VACUUM DEVICE
Publication number
20230369011
Publication date
Nov 16, 2023
HITACHI HIGH-TECH CORPORATION
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE APPARATUS, CHARGED PARTICLE BEAM APPARATUS, AND OPTICAL INSPE...
Publication number
20230343622
Publication date
Oct 26, 2023
HITACHI HIGH-TECH CORPORATION
Takanori KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND VACUUM APPARATUS
Publication number
20230260740
Publication date
Aug 17, 2023
HITACHI HIGH-TECH CORPORATION
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE, AND CHARGED PARTICLE BEAM DEVICE
Publication number
20230215684
Publication date
Jul 6, 2023
HITACHI HIGH-TECH CORPORATION
Motohiro TAKAHASHI
G01 - MEASURING TESTING
Information
Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING STAGE...
Publication number
20230143197
Publication date
May 11, 2023
HITACHI HIGH-TECH CORPORATION
Akira NISHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20230137117
Publication date
May 4, 2023
HITACHI HIGH-TECH CORPORATION
Hironori OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Linear Motor for Vacuum and Vacuum Processing Apparatus
Publication number
20220352804
Publication date
Nov 3, 2022
HITACHI HIGH-TECH CORPORATION
Tomotaka SHIBAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Stage Movement Control Apparatus and Charged Particle Beam System
Publication number
20220148845
Publication date
May 12, 2022
Hitachi High-Tech Corporation
Hironori OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Processing Apparatus
Publication number
20220076918
Publication date
Mar 10, 2022
HITACHI HIGH-TECH CORPORATION
Akira NISHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS, SAMPLE ALIGNMENT METHOD OF CHARGED...
Publication number
20210265129
Publication date
Aug 26, 2021
HITACHI HIGH-TECH CORPORATION
Hironori OGAWA
G01 - MEASURING TESTING
Information
Patent Application
Charged Particle Beam Device
Publication number
20210066025
Publication date
Mar 4, 2021
HITACHI HIGH-TECH CORPORATION
Keiichiro HOSOBUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
Publication number
20200176217
Publication date
Jun 4, 2020
Hitachi High-Technologies Corporation
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Linear Motor for Vacuum and Vacuum Processing Apparatus
Publication number
20200126749
Publication date
Apr 23, 2020
Hitachi High-Technologies Corporation
Tomotaka SHIBAZAKI
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS
Publication number
20190378678
Publication date
Dec 12, 2019
Hitachi High-Technologies Corporation
Akira NISHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Radiation Device
Publication number
20190311876
Publication date
Oct 10, 2019
Hitachi High-Technologies Corporation
Kentaro SHIGEOKA
G05 - CONTROLLING REGULATING
Information
Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
Publication number
20190259567
Publication date
Aug 22, 2019
Hitachi High-Technologies Corporation
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20190252151
Publication date
Aug 15, 2019
Hitachi High-Technologies Corporation
Takanori KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
Publication number
20190228947
Publication date
Jul 25, 2019
Hitachi High-Technologies Corporation
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
Publication number
20190103246
Publication date
Apr 4, 2019
Hitachi High-Technologies Corporation
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Stage Apparatus and Charged Particle Beam Apparatus
Publication number
20180247855
Publication date
Aug 30, 2018
Hitachi High-Technologies Corporation
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Radiation Apparatus
Publication number
20170061947
Publication date
Mar 2, 2017
Hitachi High-Technologies Corporation
Daisuke MUTOU
G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information
Patent Application
Stage Device and Charged Particle Beam Device Using the Same
Publication number
20160365219
Publication date
Dec 15, 2016
Hitachi High-Technologies Corporation
Akira NISHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Stage Apparatus and Charged Particle Radiation Apparatus Equipped w...
Publication number
20160284506
Publication date
Sep 29, 2016
Hitachi High-Technologies Corporation
Hironori OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Apparatus, Stage Controlling Method, and Stag...
Publication number
20160005568
Publication date
Jan 7, 2016
Hitachi High-Technologies Corporation
Masaki MIZUOCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Stage Device and Charged Particle Beam Apparatus Using the Stage De...
Publication number
20150248991
Publication date
Sep 3, 2015
Hironori OGAWA
G01 - MEASURING TESTING
Information
Patent Application
STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS USING SAME
Publication number
20150053857
Publication date
Feb 26, 2015
Hitachi High-Technologies Corporation
Akira NISHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SAMPLE POSITIONING APPARATUS, SAMPLE STAGE, AND CHARGED PARTICLE BE...
Publication number
20140312246
Publication date
Oct 23, 2014
Hitachi High-Technologies Corporation
Motohiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS