Masaki MUROBAYASHI

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,249,485
- Issue date Mar 11, 2025
- Kokusai Electric Corporation
- Takeshi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,230,474
- Issue date Feb 18, 2025
- Kokusai Electric Corporation
- Takeshi Yasui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 12,195,854
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, and recording medium
- Patent number 11,905,596
- Issue date Feb 20, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,837,440
- Issue date Dec 5, 2023
- Kokusai Electric Corporation
- Takeshi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,384,431
- Issue date Jul 12, 2022
- Kokusai Electric Corporation
- Masanori Nakayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, and recording medium
- Patent number 11,155,922
- Issue date Oct 26, 2021
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,145,491
- Issue date Oct 12, 2021
- Kokusai Electric Corporation
- Masaki Murobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and apparatus
- Patent number 6,658,321
- Issue date Dec 2, 2003
- Hitachi Kokusai Electric Inc.
- Akihiro Osaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240158917
- Publication date May 16, 2024
- Kokusai Electric Corporation
- Teruo YOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240105423
- Publication date Mar 28, 2024
- Kokusai Electric Corporation
- Takeshi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUC...
- Publication number 20230212753
- Publication date Jul 6, 2023
- Kokusai Electric Corporation
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE MOUNTING TABLE COVER, MET...
- Publication number 20220415700
- Publication date Dec 29, 2022
- Kokusai Electric Corporation
- Takayuki SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220230846
- Publication date Jul 21, 2022
- Kokusai Electric Corporation
- Takeshi YASUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
- Publication number 20220010433
- Publication date Jan 13, 2022
- Kokusai Electric Corporation
- Teruo YOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200219699
- Publication date Jul 9, 2020
- Kokusai Electric Corporation
- Takeshi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200168434
- Publication date May 28, 2020
- Kokusai Electric Corporation
- Masaki MUROBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
- Publication number 20190032217
- Publication date Jan 31, 2019
- Kokusai Electric Corporation
- Teruo YOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180076063
- Publication date Mar 15, 2018
- Hitachi Kokusai Electric Inc.
- Masanori NAKAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD, AND SEMICONDUCTOR DEVICE...
- Publication number 20120214317
- Publication date Aug 23, 2012
- Hitachi Kokusai Electric Inc.
- Masaki Murobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, WAFER HOLDER, AND FILM FORMING METHOD
- Publication number 20120067274
- Publication date Mar 22, 2012
- Hitachi Kokusai Electric Inc.
- Daisuke HARA
- C30 - CRYSTAL GROWTH
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20110204036
- Publication date Aug 25, 2011
- Hitachi Kokusai Electric Inc.
- Masaki MUROBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and apparatus
- Publication number 20020038164
- Publication date Mar 28, 2002
- Hitachi Kokusai Electric Inc.
- Akihiro Osaka
- H01 - BASIC ELECTRIC ELEMENTS

Masaki MUROBAYASHI

Person

Patents Grantslast 30 patents

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of processing substrate, met...

Method of manufacturing semiconductor device, and recording medium

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus

Method of manufacturing semiconductor device, and recording medium

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing method and apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE MOUNTING TABLE COVER, MET...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD, AND SEMICONDUCTOR DEVICE...

FILM FORMING APPARATUS, WAFER HOLDER, AND FILM FORMING METHOD

HEAT TREATMENT APPARATUS

Substrate processing method and apparatus