Masaki Narushima

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning method and substrate cleaning device
- Patent number 9,209,010
- Issue date Dec 8, 2015
- Tokyo Electron Limited
- Hidefumi Matsui
- B08 - CLEANING
Information Patent Grant
Substrate wiring method and semiconductor manufacturing device
- Patent number 8,940,638
- Issue date Jan 27, 2015
- Tokyo Electron Limited
- Satohiko Hoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle separation apparatus and charged particle bombardm...
- Patent number 8,168,946
- Issue date May 1, 2012
- Tokyo Electron Limited
- Masaki Narushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum process system
- Patent number 7,198,448
- Issue date Apr 3, 2007
- Tokyo Electron Limited
- Jun Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system
- Patent number 7,090,741
- Issue date Aug 15, 2006
- Tokyo Electron Limited
- Masaki Narushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum process system
- Patent number 7,025,554
- Issue date Apr 11, 2006
- Tokyo Electron Limited
- Jun Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic heater system and substrate processing apparatus having the...
- Patent number 6,951,587
- Issue date Oct 4, 2005
- Tokyo Electron Limited
- Masaki Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus
- Patent number 6,802,934
- Issue date Oct 12, 2004
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment processing mechanism and semiconductor processing device...
- Patent number 6,702,865
- Issue date Mar 9, 2004
- Tokyo Electron Limited
- Masahito Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-chamber system provided with carrier units
- Patent number 5,474,410
- Issue date Dec 12, 1995
- Tel-Varian Limited
- Masahito Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface processing apparatus
- Patent number 5,332,442
- Issue date Jul 26, 1994
- Tokyo Electron Kabushiki Kaisha
- Masao Kubodera
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for holding a plate-like member
- Patent number 5,065,495
- Issue date Nov 19, 1991
- Tokyo Electron Limited
- Masaki Narushima
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Plate-like member receiving apparatus
- Patent number 4,955,590
- Issue date Sep 11, 1990
- Tokyo Electron Limited
- Masaki Narushima
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transfer apparatus for plate-like member
- Patent number 4,941,800
- Issue date Jul 17, 1990
- Tokyo Electron Limited
- Hisashi Koike
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR FORMING DIELECTRIC FILM OF LOW-DIELECTRIC...
- Publication number 20140134852
- Publication date May 15, 2014
- TOKYO ELECTRON LIMITED
- Yusaku IZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS,...
- Publication number 20140083976
- Publication date Mar 27, 2014
- TOKYO ELECTRON LIMITED
- Noriaki TOYODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM FORMING DEVICE FOR SOLAR CELL AND THIN FILM FORMING METHOD
- Publication number 20130295751
- Publication date Nov 7, 2013
- TOKYO ELECTRON LIMITED
- Takamasa Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE CLEANING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20130056024
- Publication date Mar 7, 2013
- IWATANI CORPORATION
- Satohiko Hoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE
- Publication number 20130056033
- Publication date Mar 7, 2013
- IWATANI CORPORATION
- Hidefumi Matsui
- B08 - CLEANING
Information Patent Application
SUBSTRATE WIRING METHOD AND SEMICONDUCTOR MANUFACTURING DEVICE
- Publication number 20130040459
- Publication date Feb 14, 2013
- IWATANI CORPORATION
- Satohiko Hoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE PROCESSING METHOD AND SURFACE PROCESSING APPARATUS
- Publication number 20120128892
- Publication date May 24, 2012
- TOKYO ELECTRON LIMITED
- Noriaki TOYODA
- C30 - CRYSTAL GROWTH
Information Patent Application
CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS,...
- Publication number 20120125889
- Publication date May 24, 2012
- TOKYO ELECTRON LIMITED
- Noriaki TOYODA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...
- Publication number 20100320380
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- MASAKI NARUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...
- Publication number 20100319545
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- MASAKI NARUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE MANUFAC...
- Publication number 20100099254
- Publication date Apr 22, 2010
- Tokyo Electron Limited
- Masaki Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20090325393
- Publication date Dec 31, 2009
- TOKYO ELECTRON LIMITED
- Hidenori Miyoshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum process system
- Publication number 20060182539
- Publication date Aug 17, 2006
- TOKYO ELECTRON LIMITED
- Jun Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition method
- Publication number 20060099348
- Publication date May 11, 2006
- TOKYO ELECTRON LIMITED
- Masaki Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation method
- Publication number 20060084266
- Publication date Apr 20, 2006
- TOKYO ELECTRON LIMITED
- Masaki Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor processing system
- Publication number 20050006230
- Publication date Jan 13, 2005
- Masaki Narushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum process system
- Publication number 20040105737
- Publication date Jun 3, 2004
- TOKYO ELECTRON LIMITED
- Jun Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus
- Publication number 20030136515
- Publication date Jul 24, 2003
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus
- Publication number 20020020355
- Publication date Feb 21, 2002
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS

Masaki Narushima

Person

Patents Grantslast 30 patents

Substrate cleaning method and substrate cleaning device

Substrate wiring method and semiconductor manufacturing device

Charged particle separation apparatus and charged particle bombardm...

Vacuum process system

Semiconductor processing system

Vacuum process system

Ceramic heater system and substrate processing apparatus having the...

Processing apparatus

Alignment processing mechanism and semiconductor processing device...

Multi-chamber system provided with carrier units

Surface processing apparatus

Method for holding a plate-like member

Plate-like member receiving apparatus

Transfer apparatus for plate-like member

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR FORMING DIELECTRIC FILM OF LOW-DIELECTRIC...

CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS,...

THIN FILM FORMING DEVICE FOR SOLAR CELL AND THIN FILM FORMING METHOD

SUBSTRATE CLEANING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE

SUBSTRATE WIRING METHOD AND SEMICONDUCTOR MANUFACTURING DEVICE

SURFACE PROCESSING METHOD AND SURFACE PROCESSING APPARATUS

CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS,...

CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...

CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...

SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE MANUFAC...

HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS

Vacuum process system

Deposition method

Film formation method

Semiconductor processing system

Vacuum process system

Processing apparatus

Processing apparatus