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Masaki Nishikawa

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  • Miyagi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190318912
    • Publication date Oct 17, 2019
    • TOKYO ELECTRON LIMITED
    • Naoyuki UMEHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND FILTER UNIT
    • Publication number 20150235809
    • Publication date Aug 20, 2015
    • TOKYO ELECTRON LIMITED
    • Keiki Ito
    • H01 - BASIC ELECTRIC ELEMENTS