Masaki Ohashi

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Joetsu, PA, US

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Patents Grantslast 30 patents

Information Patent Grant
Sulfonium salt, polymer, polymer making method, resist composition,...
- Patent number 9,146,464
- Issue date Sep 29, 2015
- Shin-Etsu Chemical Co., Ltd.
- Masaki Ohashi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...