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Masaki SANO

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD OF FORMING TUNGSTEN FILM AND SYSTEM THEREFOR
    • Publication number 20220290294
    • Publication date Sep 15, 2022
    • TOKYO ELECTRON LIMITED
    • Masafumi TAKAHASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TiN-BASED FILM AND TiN-BASED FILM FORMING METHOD
    • Publication number 20180135169
    • Publication date May 17, 2018
    • Tadahiro ISHIZAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LOWER ELECTRODE OF DRAM CAPACITOR AND MANUFACTURING METHOD THEREOF
    • Publication number 20170179219
    • Publication date Jun 22, 2017
    • Tadahiro ISHIZAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR FORMING TiON FILM
    • Publication number 20170092489
    • Publication date Mar 30, 2017
    • TOKYO ELECTRON LIMITED
    • Tadahiro ISHIZAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20160177445
    • Publication date Jun 23, 2016
    • TOKYO ELECTRON LIMITED
    • Tsuyoshi TAKAHASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS, GAS SUPPLY DEVICE AND FILM FORMING METHOD
    • Publication number 20140295083
    • Publication date Oct 2, 2014
    • TOKYO ELECTRON LIMITED
    • Masayuki NASU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA NITRIDING METHOD
    • Publication number 20130022760
    • Publication date Jan 24, 2013
    • TOKYO ELECTRON LIMITED
    • Toshinori Debari
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND DEVICE ISOLATION METHOD
    • Publication number 20120252188
    • Publication date Oct 4, 2012
    • TOKYO ELECTRON LIMITED
    • Ryota YONEZAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...