Masaki Satake

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Saitama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dispositioning defects detected on extreme ultraviolet photomasks
- Patent number 10,866,197
- Issue date Dec 15, 2020
- KLA Corp.
- Vikram Tolani
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS
- Publication number 20200096862
- Publication date Mar 26, 2020
- KLA Corporation
- Vikram Tolani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY