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Masaki Sohma
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Yamanashi-Ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Heat treating device
Patent number
6,759,633
Issue date
Jul 6, 2004
Tokyo Electron Limited
Masato Kubodera
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process system with transfer unit for object to be processed
Patent number
6,395,094
Issue date
May 28, 2002
Tokyo Electron Limited
Keiichi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Auxiliary vacuum chamber and vacuum processing unit using same
Patent number
6,234,107
Issue date
May 22, 2001
Tokyo Electron Limited
Keiichi Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Heat treating device
Publication number
20030075535
Publication date
Apr 24, 2003
Masato Kubodera
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...