Masaki Sugiyama

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing system, plasma measurement system, plasma measure...
- Patent number 8,241,457
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Mitsuo Kato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HEATING APPARATUS, SUBSTRATE HEATING METHOD AND SUBSTRATE...
- Publication number 20110183279
- Publication date Jul 28, 2011
- TOKYO ELECTRON LIMITED
- Tomoya OKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20090151638
- Publication date Jun 18, 2009
- TOKYO ELECTRON LIMITED
- Toshiki KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING SYSTEM, PLASMA MEASUREMENT SYSTEM, PLASMA MEASURE...
- Publication number 20080241016
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Mitsuo KATO
- H01 - BASIC ELECTRIC ELEMENTS