Masaki Tai

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure method, exposure apparatus, method of manufacturing articl...
- Patent number 11,194,257
- Issue date Dec 7, 2021
- Canon Kabushiki Kaisha
- Masaki Tai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,237,917
- Issue date Aug 7, 2012
- Canon Kabushiki Kaisha
- Masaki Tai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, METHOD OF MANUFACTURING ARTICL...
- Publication number 20190377269
- Publication date Dec 12, 2019
- Canon Kabushiki Kaisha
- Masaki Tai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090310110
- Publication date Dec 17, 2009
- Canon Kabushiki Kaisha
- Masaki Tai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY