Masaki Taira

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Tosu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 9,117,854
- Issue date Aug 25, 2015
- Tokyo Electron Limited
- Masaki Taira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method
- Patent number 7,678,199
- Issue date Mar 16, 2010
- Tokyo Electron Limited
- Shogo Mizota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 7,608,163
- Issue date Oct 27, 2009
- Tokyo Electron Limited
- Masaki Taira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary shaft sealing mechanism and liquid processing apparatus
- Patent number 7,347,214
- Issue date Mar 25, 2008
- Tokyo Electron Limited
- Koji Egashira
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20110220157
- Publication date Sep 15, 2011
- TOKYO ELECTRON LIMITED
- Masaki TAIRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD
- Publication number 20080053489
- Publication date Mar 6, 2008
- TOKYO ELECTRON LIMITED
- Shogo Mizota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method
- Publication number 20030224625
- Publication date Dec 4, 2003
- TOKYO ELECTRON LIMITED
- Masaki Taira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rotary shaft sealing mechanism and liquid processing apparatus
- Publication number 20030178785
- Publication date Sep 25, 2003
- Koji Egashira
- H01 - BASIC ELECTRIC ELEMENTS