Masaki Tokunaga

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Tama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device with helium-containin...
- Patent number 11,037,780
- Issue date Jun 15, 2021
- ASM IP Holding B.V.
- Toshiaki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of subatmospheric plasma-enhanced ALD using capacitively cou...
- Patent number 10,435,790
- Issue date Oct 8, 2019
- ASM IP Holding B.V.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of processing substrate
- Patent number 9,818,601
- Issue date Nov 14, 2017
- ASM IP Holding B.V.
- Masaki Tokunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190181002
- Publication date Jun 13, 2019
- ASM IP HOLDING B.V.
- Toshiaki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SUBATMOSPHERIC PLASMA-ENHANCED ALD USING CAPACITIVELY COU...
- Publication number 20180119283
- Publication date May 3, 2018
- ASM IP HOLDING B.V.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...