Masaki Tozawa

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Fussa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for dynamic sensor configuration and runtime execution
- Patent number 7,636,608
- Issue date Dec 22, 2009
- Tokyo Electron Limited
- Merritt Funk
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for monitoring tool performance
- Patent number 7,113,838
- Issue date Sep 26, 2006
- Tokyo Electron Limited
- Merritt Funk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning plasma treatment device and plasma treatment sy...
- Patent number 6,443,165
- Issue date Sep 3, 2002
- Tokyo Electron Limited
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma film forming method and plasma film forming apparatus
- Patent number 6,355,902
- Issue date Mar 12, 2002
- Tokyo Electron Limited
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma film forming method and plasma film forming apparatus
- Patent number 6,215,087
- Issue date Apr 10, 2001
- Tokyo Electron Limited
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for monitoring tool performance
- Publication number 20050171627
- Publication date Aug 4, 2005
- TOKYO ELECTRON LIMITED
- Merritt Funk
- G05 - CONTROLLING REGULATING
Information Patent Application
Plasma film forming method and plasma film forming apparatus
- Publication number 20010020608
- Publication date Sep 13, 2001
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...