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Masaki Uematsu
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Shizuoka-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for the preparation of film
Patent number
8,591,655
Issue date
Nov 26, 2013
ULVAC, Inc.
Takeshi Masuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shower head, device and method for manufacturing thin films
Patent number
8,262,798
Issue date
Sep 11, 2012
ULVAC, Inc.
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas head and thin-film manufacturing apparatus
Patent number
8,197,599
Issue date
Jun 12, 2012
ULVAC, Inc.
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film-forming apparatus and film-forming method
Patent number
8,168,001
Issue date
May 1, 2012
ULVAC, Inc.
Hiroto Uchida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mixing box, and apparatus and method for producing films
Patent number
8,118,935
Issue date
Feb 21, 2012
ULVAC, Inc.
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Device and method for manufacturing thin films
Patent number
7,618,493
Issue date
Nov 17, 2009
Ulvac, Inc.
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mixer, and device and method for manufacturing thin-film
Patent number
6,933,010
Issue date
Aug 23, 2005
ULVAC, Inc.
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Gas Head and Thin-Film Manufacturing Apparatus
Publication number
20090250004
Publication date
Oct 8, 2009
ULVAC, Inc.
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus for preparing oxide thin film and method for preparing th...
Publication number
20070054472
Publication date
Mar 8, 2007
Yutaka Nishioka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Mixing box, and apparatus and method for producing films
Publication number
20050211168
Publication date
Sep 29, 2005
ULVAC Inc.
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus for the preparation of film
Publication number
20050199182
Publication date
Sep 15, 2005
ULVAC, Inc.
Takeshi Masuda
C30 - CRYSTAL GROWTH
Information
Patent Application
Device and method for manufacturing thin films
Publication number
20050059246
Publication date
Mar 17, 2005
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Shower head, device and method for manufacturing thin films
Publication number
20050056217
Publication date
Mar 17, 2005
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Mixer, and device and method for manufacturing thin-film
Publication number
20040089235
Publication date
May 13, 2004
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film-forming apparatus and film-forming method
Publication number
20030198741
Publication date
Oct 23, 2003
ULVAC, Inc.
Hiroto Uchida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Vacuum processing apparatus and multi-chamber vacuum processing app...
Publication number
20020000197
Publication date
Jan 3, 2002
Takeshi Masuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...